Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition

Optics Express

Volumn 20, Issue 25, 2012, Pages 27661-27669

  Riemensberger, Johann ^a   Hartinger, Klaus ^a,b   Herr, Tobias ^a   Brasch, Victor ^a   Holzwarth, Ronald ^b,c   Kippenberg, Tobias J ^a,c  

^a EPFL   (Switzerland)

^b MENLO SYSTEMS GMBH   (Germany)

^c MAX PLANCK INSTITUT FÜR QUANTENOPTIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANOMALOUS DISPERSION; CONFORMAL COATINGS; DIODE-LASER; DISPERSION ENGINEERING; HAFNIUM DIOXIDE; HIGH RESOLUTION; MODE SPECTRUM; RING RESONATOR;

ATOMIC LAYER DEPOSITION; HAFNIUM OXIDES; LASER SPECTROSCOPY; SILICON NITRIDE;

DISPERSIONS;

HAFNIUM; OXIDE; SILICON DERIVATIVE; SILICON DIOXIDE; SILICON NITRIDE;

ARTICLE; CHEMISTRY; DIODE LASER; EQUIPMENT; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; METHODOLOGY; MICROTECHNOLOGY; NONLINEAR SYSTEM; OPTICS; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; THEORETICAL MODEL;

EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; HAFNIUM; LASERS, SEMICONDUCTOR; MICROSCOPY, ELECTRON, SCANNING; MICROTECHNOLOGY; MODELS, THEORETICAL; NONLINEAR DYNAMICS; OPTICS AND PHOTONICS; OXIDES; SILICON COMPOUNDS; SILICON DIOXIDE; SPECTRUM ANALYSIS;

EID: 84870580017     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.027661     Document Type: Article

References (30)

1. 2 optical waveguides on Si," Appl. Opt. 26, 2621-2624 (1987).
2. J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, "CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects," Nat. Photonics 4, 37-40 (2010).
3. J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blu-menthal, and J. E. Bowers, "Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding," Opt. Express 19, 24090-24101 (2011).
4. M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, "Broad-band optical parametric gain on a silicon photonic chip," Nature 441, 960-963 (2006).
5. C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, "Nonlinear silicon-on-insulator waveguides for all-optical signal processing," Opt. Express 15, 5976-5990 (2007).
6. T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, "Microresonator- based optical frequency combs," Science 332, 555-559 (2011).
7. M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, "Silicon-based monolithic optical frequency comb source," Opt. Express 19, 14233-14239 (2011).
8. P. Del'Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, "Full stabilization of a microresonator-based optical frequency comb," Phys. Rev. Lett. 101, 053903 (2008).
9. T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D'Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, "Laserfrequency combs for astronomical observations," Science 321, 1335-1337 (2008).
10. J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, "Microresonator-based optical frequency combs for high-bitrate WDM data transmission," in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.
11. F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, "Spectral line-by-line pulse shaping ofon-chip microresonatorfrequency combs," Nat. Photonics 5, 770-776 (2011).
12. A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, "Kerr combs with selectable central frequency," Nat. Photonics 5, 293-296 (2011).
13. C. Y. Wang, T. Herr, P. Del'Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kip-penberg, "Mid-infrared optical frequency combs based on crystalline microresonators," arXiv:1109.2716 (2011).
14. P. Del'Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, "Octave spanning tunable frequency comb from a microresonator," Phys. Rev. Lett. 107, 063901 (2011).
15. Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, "Octave-spanning frequency comb generation in a silicon nitride chip," Opt. Lett. 36, 3398-3400 (2011).
16. A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, "Mode-locked Kerr fre-quency combs," Opt. Lett. 36, 2845-2847 (2011).
17. T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kip-penberg, "Universal formation dynamics and noise of Kerr-frequency combs in microresonators," Nat. Photonics 6, 480-487 (2012).
18. A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, "Tailored anomalous group-velocity dispersion in silicon channel waveguides," Opt. Express 14, 4357-4362 (2006).
19. P. Del'Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, "Frequency comb assisted diode laser spectroscopy for measurement ofmicrocavity dispersion," Nat. Photonics 3, 529-533 (2009).
20. X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, "Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires," Opt. Lett. 33, 2889-2891 (2008).
21. T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honka-nen, "Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition," Opt. Express 19, 11529-11538 (2011).
22. A. Gondarenko, J. S. Levy, and M. Lipson, "High confinement micron-scale silicon nitride high-Q ring res-onator," Opt. Express 17, 11366-11370 (2009).
23. V. R. Almeida, R. R. Panepucci, and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett. 28, 1302-1304 (2003).
24. T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Modal coupling in traveling-wave resonators," Opt. Lett. 27, 1669-1671 (2002).
25. T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, "Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities," Phys. Rev. Lett. 100, 103905 (2008).
26. A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, "Fano resonance in a multimode tapered fiber coupledwith amicrospherical cavity," Appl. Phys. Lett. 86, 261106 (2005).
27. T. Carmon, L. Yang, and K. Vahala, "Dynamical thermal behavior and thermal self-stability of microcavities," Opt. Express 12, 4742-4750 (2004).
28. M. Oxborrow, "Traceable 2-D finite-element simulation of the whispering-gallery modes ofaxisymmetric elec-tromagnetic resonators," IEEE Trans. Microwave Theory Tech. 55, 1209-1218 (2007).
29. D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, "Group velocity dispersion and self phase modulation in silicon nitride waveguides," Appl. Phys. Lett. 96, 061101 (2010).
30. L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, "Analysis and engineering ofchromatic dispersion in silicon waveguide bends and ring resonators," Opt. Express 19, 8102-8107 (2011).