Anisotropy and densification of polymer ultrathin films as seen by multi-angle ellipsometry and X-ray reflectometry

Polymer

Volumn 53, Issue 4, 2012, Pages 1028-1033

  Ata, Seisuke ^a,b   Kuboyama, Keiichi ^a   Ito, Kenji ^b   Kobayashi, Yoshinori ^b   Ougizawa, Toshiaki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Densification; Optical anisotropy; Polymer thin film

Indexed keywords

ANISOTROPY; BENZENE; DENSIFICATION; OPTICAL ANISOTROPY; POLYMER FILMS; QUANTUM CHEMISTRY; REFLECTION; REFLECTOMETERS; REFRACTIVE INDEX; SILICON WAFERS; SPECTROSCOPIC ELLIPSOMETRY; THICK FILMS; X RAYS;

ATTRACTIVE INTERACTIONS; CHAIN CONFORMATIONS; OVERLAP CONCENTRATION; POLYMER CONCENTRATIONS; POLYMER THIN FILMS; QUANTUM CHEMICAL CALCULATIONS; SUBSTRATE SURFACE; X-RAY REFLECTOMETRY;

ULTRATHIN FILMS;

EID: 84870482031     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.polymer.2012.01.013     Document Type: Article

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