Investigation of surface acoustic waves propagating in ZnO-SiO 2-Si multilayer structure

Ultrasonics

Volumn 53, Issue 2, 2013, Pages 363-368

  Zhang, Zuwei ^a   Wen, Zhiyu ^a   Wang, Chunmei ^a  

^a CHONGQING UNIVERSITY   (China)

Author keywords

Multilayered structure; RAM; SAW

Indexed keywords

ASYMPTOTIC METHOD; ELECTROMECHANICAL COUPLING COEFFICIENTS; FABRICATION PROCESS; LAYER THICKNESS; LOVE MODE; LOVE WAVE; MULTI-LAYERED STRUCTURE; MULTILAYER STRUCTURES; SAW DEVICE; SURFACE ACOUSTIC WAVES; THEORETICAL RESULT; THERMAL-ANNEALING; ZNO FILMS; ZNO LAYERS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ELECTROMECHANICAL DEVICES; FREQUENCY RESPONSE; MEMS; RANDOM ACCESS STORAGE; SAWS; SILICON;

ZINC OXIDE;

EID: 84870252605     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2012.07.002     Document Type: Article

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