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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 6, 2012, Pages

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

(3) Fleutot, Benoit a Miller, James B a,b Gellman, Andrew J a,b

a CARNEGIE MELLON UNIVERSITY (United States)

b NATIONAL ENERGY TECHNOLOGY LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOY COMPOSITIONS; ALLOY FILM; CODEPOSITION; COMPOSITION GRADIENT; COMPOSITION SPACE; COMPOSITION SPREAD; DEPOSITION SUBSTRATES; FOUR ELECTRONS; HIGH THROUGHPUT; LOCAL COMPOSITIONS; MATERIALS LIBRARIES; MULTICOMPONENT MATERIALS; PURE COMPONENTS; SHADOW MASK; SPATIAL GRADIENTS; THREE COMPONENT;

ELECTRON BEAMS;

METALLIC FILMS;

EID: 84870051112 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.4766194 Document Type: Article

Times cited : (36)

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