High-throughput combinatorial study of local stress in thin film composition spreads

Review of Scientific Instruments

Volumn 78, Issue 7, 2007, Pages

  Woo, Noble C ^a   Ng, Bryan G ^b   Van Dover, R Bruce ^c  

^a Department of Molecular Biology and Genetics   (United States)

^b USA   (United States)

^c School of Chemical and Molecular Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; ELECTRON PROBE MICROANALYSIS; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; MARTENSITIC TRANSFORMATIONS; MEMS; OPTICAL SYSTEMS; SHAPE MEMORY EFFECT; THROUGHPUT;

COMPOSITION SPREAD FILMS; DENSE ARRAY; MAGNETOSTRICTIVE MATERIALS; SPATIAL RESOLUTION;

THIN FILMS;

ARTICLE; ARTIFICIAL MEMBRANE; COMBINATORIAL CHEMISTRY; ELASTICITY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; MECHANICAL STRESS; METHODOLOGY; MICROMANIPULATION; TRANSDUCER;

COMBINATORIAL CHEMISTRY TECHNIQUES; ELASTICITY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; MICROMANIPULATION; STRESS, MECHANICAL; TRANSDUCERS;

EID: 34547566094     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2755779     Document Type: Article

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