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Volumn , Issue , 2011, Pages 164-169

Photon emission spectra through silicon of various thicknesses

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL FIELD; ELECTRON HOLE PAIRS; FREE CARRIERS; MATERIAL REMOVAL; MECHANICAL GRINDING; MOSFETS; PHOTON EMISSION MICROSCOPY; PHOTON EMISSIONS; SILICON LAYER; SILICON SUBSTRATES; SUBSTRATE MATERIAL; VISIBLE AND NEAR INFRARED;

EID: 84869749154     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (7)

References (7)
  • 3
    • 33847637090 scopus 로고    scopus 로고
    • Functional IC Analysis Through Chip Backside with Nano Scale Resolution - E-Beam Probing in FIB Trenches to STI Level
    • R. Schlangen, R. Leihkauf, U. Kerst, C. Boit, "Functional IC Analysis Through Chip Backside With Nano Scale Resolution - E-Beam Probing in FIB Trenches to STI Level", Proc. ISTFA 2006, pages 376-381
    • Proc. ISTFA 2006 , pp. 376-381
    • Schlangen, R.1    Leihkauf, R.2    Kerst, U.3    Boit, C.4
  • 6
    • 0000920502 scopus 로고
    • Optical absorption in heavily doped silicon
    • P. E. Schmid, "Optical absorption in heavily doped silicon", Phys. Rev. B, 23, pp. 5531-5536 (1981)
    • (1981) Phys. Rev. B , vol.23 , pp. 5531-5536
    • Schmid, P.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.