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Volumn , Issue , 2011, Pages 164-169
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Photon emission spectra through silicon of various thicknesses
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRICAL FIELD;
ELECTRON HOLE PAIRS;
FREE CARRIERS;
MATERIAL REMOVAL;
MECHANICAL GRINDING;
MOSFETS;
PHOTON EMISSION MICROSCOPY;
PHOTON EMISSIONS;
SILICON LAYER;
SILICON SUBSTRATES;
SUBSTRATE MATERIAL;
VISIBLE AND NEAR INFRARED;
ELECTROLUMINESCENCE;
EMISSION SPECTROSCOPY;
FAILURE ANALYSIS;
LIGHT;
MOSFET DEVICES;
PHOTONS;
SILICON;
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EID: 84869749154
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (7)
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