Size scaling of mesoporous silica membranes produced by nanosphere mediated laser ablation

Nanotechnology

Volumn 23, Issue 48, 2012, Pages

  Grojo, D ^a   Boarino, L ^b   De Leo, N ^b   Rocci, R ^b   Panzarasa, G ^c   Delaporte, P ^a   Laus, M ^c   Sparnacci, K ^c  

^a AIX MARSEILLE UNIVERSITY   (France)

^b ISTITUTO NAZIONALE DI RICERCA METROLOGICA   (Italy)

^c UNIVERSITY OF EASTERN PIEDMONT   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION THRESHOLDS; HOT SPOT; LASER-PULSE ENERGY; LOCAL FIELD ENHANCEMENT; LOCAL FIELDS; MESOPOROUS SILICA MEMBRANES; MIE RESONANCE; MONODISPERSE SILICA; NANOSECOND LASER PULSE; OXIDIZED SILICON SUBSTRATES; POROUS MEMBRANES; SELF-ASSEMBLED; SILICON DIOXIDE LAYERS; SIZE SCALING;

LASER PULSES; LASERS; MONOLAYERS; NANOSPHERES; POROUS SILICON; SILICA; SILICON OXIDES;

LASER ABLATION;

EID: 84869049939     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/48/485305     Document Type: Article

References (26)

1. Yang S-M, Jang S G, Choi D-G, Kim S and Yu H K 2006 Nanomachining by colloidal lithography Small 2 458
2. Boarino L, Destro M, Borini S, Pugno N, Chiodoni A, Bellotti F and Amato G 2009 Self-catalytic etching of silicon from nanowires to regular mesopores Phys. Status Solidi a 206 1250
3. Wu W, Katsnelson A, Memis O G and Mohseni H 2007 A deep sub-wavelength process for the formation of highly uniform arrays of nanoholes and nanopillars Nanotechnology 18 485302
4. Grojo D, Cros A, Delaporte Ph and Sentis M 2007 Experimental investigation of ablation mechanisms involved in dry laser cleaning Appl. Surf. Sci. 253 8309
5. Zou S and Schartz G C 2006 Phys. Rev. B 74 125111
6. Landstrom L, Klimstein J, Schrems G, Piglmayer K and Bauerle D 2004 Single-step patterning and the fabrication of contact masks by laser-induced forward transfer Appl. Phys. A 78 537
7. Langer G, Brodoceanu D and Baeuerle D 2006 Femtosecond laser fabrication of apertures on two-dimensional microlens arrays Appl. Phys. Lett. 89 261104
8. McLeod E and Arnold C B 2008 Subwavelength direct-write nanopatterning using optically trapped microspheres Nat. Nanotechnol. 3 413
9. Pereira A, Grojo D, Chaker M, Delaporte P, Guay D and Sentis M 2008 Laser-fabricated porous alumina membranes for the preparation of metal nanodot arrays Small 4 572
10. Kabashin A V, Delaporte P, Pereira A, Grojo D, Torres R, Sarnet T and Sentis M 2010 Nanofabrication with pulsed lasers Nanoscale Res. Lett. 5 454
11. Van Blaaderen A, Geest J V and Vrij A 1992 Monodisperse colloidal silica spheres from tetraalkoxysilanes: particle formation and growth mechanism J. Colloid Interface Sci. 154 481
12. Kern W 1993 Handbook of Semiconductor Wafer Cleaning Technology (New Jersey: Noyes Publications)
13. Mie G 1908 Articles on the optical characteristics of turbid tubes, especially colloidal metal solutions Ann. Phys., Lpz. 25 377-445
14. Bobbert P A and Vlieger J 1986 Light scattering by a sphere on a substrate Physica A 137 209-42
15. LukYanchuck B S (ed) 2002 Laser Cleaning (Singapore: World Scientific)
16. Grojo D, Cros A, Delaporte P and Sentis M 2006 Time-of-flight measurements of ejected particles during dry laser cleaning Appl. Phys. B 84 517-21
17. Grojo D, Delaporte Ph, Sentis M, Pakarinen O H and Foster A S 2008 The so-called dry laser cleaning governed by humidity at the nanometer scale Appl. Phys. Lett. 92 033108
18. Kabashin A V, Sarnet T, Grojo D, Delaporte Ph, Charmasson L, Blandin P, Torres R, Derrien T J-Y and Sentis M 2012 Laser-ablative nanostructuring of surfaces Int. J. Nanotechnol. 9 230-45
19. Sakai T, Tanaka Y, Nishizawa Y, Terakawa M and Obara M 2010 Size parameter effect of dielectric small particle mediated nano-hole patterning on silicon wafer by femtosecond laser Appl. Phys. A 99 39
20. Grojo D, Charmasson L, Pereira A, Sentis M and Delaporte Ph 2011 Monitoring photonic nanojets from microsphere arrays by femtosecond laser ablation of thin films J. Nanosci. Nanotechnol. 11 9129-35
21. Grojo D, Delaporte Ph and Sentis M 2008 The influence of humidity on the mechanisms involved in laser-induced particle ejection experiments J. Adhes. Sci. Technol. 22 623-34
22. Masuda H, Yasui K and Nishio K 2000 Fabrication of ordered arrays of multiple nanodots using anodic porous alumina as an evaporation mask Adv. Mater. 12 1031
23. Nam W, Seo H, Park S C, Bae C H, Nam S H, Park S M and Ha J S 2004 Fabrication of nanodot arrays on si by pulsed laser deposition using anodic aluminum oxide nanopore membrane as mask Japan. J. Appl. Phys. 43 7793
24. Bae C H, Park S M, Park S C and Ha J S 2006 Array of ultraviolet luminescent zno nanodots fabricated by pulsed laser deposition using an anodic aluminium oxide template Nanotechnology 17 381
25. Lei Y and Chim W-K 2005 Shape and size control of regularly arrayed nanodots fabricated using ultrathin alumina masks Chem. Mater. 17 580
26. Watanabe R, Yokoi T, Kobayashi E, Otsuka Y, Shimojima A, Okubo T and Tatsumi T 2011 Extension of size of monodisperse silica nanospheres and their well-ordered assembly J. Colloid Interface Sci. 360 1