Macro energy harvester based on aluminium nitride thin films

IEEE International Ultrasonics Symposium, IUS

Volumn , Issue , 2011, Pages 1928-1931

  Ricart, T ^a   Lassagne, P P ^a   Boisseau, S ^a   Despesse, G ^a   Lefevre, A ^a   Billard, C ^a   Fanget, S ^a   Defay, E ^a  

^a CEA GRENOBLE   (France)

Author keywords

AlN; cantilever; low frequency vibrations; piezoelectric; Power harvesting; PZT

Indexed keywords

ALN; CANTILEVER; LOW-FREQUENCY VIBRATION; PIEZOELECTRIC; POWER HARVESTING; PZT;

ALUMINUM; ENERGY HARVESTING; ENERGY MANAGEMENT; NANOCANTILEVERS; NITRIDES; PIEZOELECTRICITY; SENSORS; THIN FILMS;

ALUMINUM NITRIDE;

EID: 84869022513     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2011.0480     Document Type: Conference Paper

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