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Volumn 45, Issue 3, 2012, Pages 477-494
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Micropatternable multifunctional nanocomposite polymers for flexible soft NEMS and MEMS applications
a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CARBON NANOTUBES;
FABRICATION;
IRON ALLOYS;
MICROCHANNELS;
MICROMACHINING;
MIXING;
MOLDING;
NANOCOMPOSITES;
NANOSYSTEMS;
NEODYMIUM ALLOYS;
POLYDIMETHYLSILOXANE;
SILICONES;
SUBSTRATES;
ULTRASONIC APPLICATIONS;
ELECTRICALLY CONDUCTIVE;
ELECTROMECHANICAL SYSTEMS;
MEMS APPLICATIONS;
MULTIFUNCTIONAL NANOCOMPOSITES;
NANOCOMPOSITE POLYMERS;
POLYDIMETHYLSILOXANE PDMS;
POLYMERIC NANOCOMPOSITES;
ULTRASONIC MIXING;
POLYMER MATRIX COMPOSITES;
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EID: 84869015817
PISSN: 19385862
EISSN: 19386737
Source Type: Conference Proceeding
DOI: 10.1149/1.3700913 Document Type: Conference Paper |
Times cited : (214)
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References (19)
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