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Volumn 7926, Issue , 2011, Pages
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Commercial plexiglass mirrors and MEMS: New approach toward low cost polymer micro-systems
a
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Author keywords
Electrical properties; MEMS; Micromachining; PMMA; PMMA mirrors
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Indexed keywords
BATCH FABRICATION;
ELECTRICAL PROPERTY;
LOW COSTS;
MEMSDEVICES;
NEW APPROACHES;
PHOTOLITHOGRAPHIC PROCESS;
PMMA;
PMMA MIRRORS;
SIGNAL ROUTING;
SPUTTERING METALS;
ALUMINUM;
COMPOSITE MICROMECHANICS;
ELECTRIC PROPERTIES;
ETHANOL;
MICROANALYSIS;
MICROFABRICATION;
MICROMACHINING;
MIRRORS;
PHOTOLITHOGRAPHY;
ALUMINUM COATINGS;
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EID: 79953712016
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.876592 Document Type: Conference Paper |
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Times cited : (3)
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References (0)
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