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Angewandte Chemie - International Edition

Volumn 51, Issue 46, 2012, Pages 11602-11605

Electrochemical X-ray photolithography

(5) Eliseev, Andrei A a Sapoletova, Nina A a Snigireva, Irina b Snigirev, Anatoly b Napolskii, Kirill S a

a MOSCOW STATE UNIVERSITY (Russian Federation)

b EUROPEAN SYNCHROTRON RADIATION FACILITY (France)

Author keywords

electrochemistry; nickel; photolithography; synchrotron radiation

Indexed keywords

COHERENT X-RAYS; ELECTROCHEMICAL DEPOSITION; ELECTROCHEMICAL PROCESSING; LITHOGRAPHIC MASK; PROOF OF CONCEPT;

NICKEL; PHOTOLITHOGRAPHY; REDUCTION; SYNCHROTRON RADIATION; X RAYS;

ELECTROCHEMISTRY;

EID: 84868580974 PISSN: 14337851 EISSN: 15213773 Source Type: Journal
DOI: 10.1002/anie.201204801 Document Type: Article

Times cited : (7)

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