A SEM study of nanosized metal films and metal nanoparticles obtained by magnetron sputtering

Russian Chemical Bulletin

Volumn 60, Issue 12, 2011, Pages 2602-2607

  Kashin, A S ^a   Ananikov, V P ^a  

^a N D ZELINSKY INSTITUTE OF ORGANIC CHEMISTRY   (Russian Federation)

Author keywords

Magnetron sputtering; Nanofilms; Nanoparticles; Scanning electron microscopy

Indexed keywords

EID: 84868354054     PISSN: 10665285     EISSN: 15739171     Source Type: Journal    
DOI: 10.1007/s11172-011-0399-x     Document Type: Article

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