A comparative study of thin coatings of Au/Pd, Pt and Cr produced by magnetron sputtering for FE-SEM

Journal of Microscopy

Volumn 189, Issue 1, 1998, Pages 79-89

  Stokroos, I ^a   Kalicharan, D ^a   Van Der Want, J J L ^a   Jongebloed, W L ^a  

^a UNIVERSITY OF GRONINGEN   (Netherlands)

Author keywords

Au Pd; Cr; Field emission scanning electron microscopy; High vacuum evaporation; Planar magnetron sputtercoating; Pt

Indexed keywords

ELECTRON EMISSION; ENAMELS; FIELD EMISSION MICROSCOPES; GOLD DEPOSITS; MAGNETRON SPUTTERING; MICA; PARTICLE SIZE; SCANNING ELECTRON MICROSCOPY; THERMAL EVAPORATION;

AU/PD; CR; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HIGH-VACUUM EVAPORATION; IN-FIELD; PARTICLES SIZES; PLANAR MAGNETRA SPUTTERCOATING; PLANAR MAGNETRON; PT; SPUTTER COATING;

CARBON FILMS;

CARBON; CHROMIUM; COPPER; GOLD; METAL; PALLADIUM;

ARTICLE; ARTIFACT REDUCTION; CELL ULTRASTRUCTURE; CONDUCTANCE; ELECTRON MICROSCOPY; IMAGE QUALITY; PARTICLE SIZE; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0031907661     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1998.00282.x     Document Type: Article

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