Pulsed laser deposited-PZT based MEMS energy harvesting devices

Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012

Volumn , Issue , 2012, Pages

  Jambunathan, Madhusudhanan ^a   Elfrink, Rene ^a   Vullers, Ruud ^a   Van Schaijk, Rob ^a   Dekkers, Matthijn ^b   Broekmaat, Joska ^b  

^a HOLST CENTRE   (Netherlands)

^b Solmates   (Netherlands)

Author keywords

PZT; shock excitation; vibrational energy harevsting

Indexed keywords

ENERGY HARVESTING DEVICE; MAXIMUM POWER OUTPUT; POTENTIAL APPLICATIONS; PZT; PZT THIN FILM; SHOCK EXCITATION; SINUSOIDAL INPUT; VIBRATIONAL ENERGIES;

DEPOSITS; FILM GROWTH; PULSED LASER DEPOSITION; THIN FILMS;

ENERGY HARVESTING;

EID: 84867914799     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2012.6297807     Document Type: Conference Paper

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