Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals

Journal of Electroceramics

Volumn 19, Issue 4, 2007, Pages 407-411

  Prume, Klaus ^a   Muralt, Paul ^b   Calame, Florian ^b   Schmitz Kempen, Thorsten ^a   Tiedke, Stephan ^a  

^a AIXACCT SYSTEMS GMBH   (Germany)

^b EPFL   (Switzerland)

Author keywords

4 point bending; MEMS devices; Piezoelectric coefficients d33,f and e31,f; PZT thin film

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MEMS; PIEZOELECTRIC MATERIALS; SOL-GEL PROCESS; STRESSES;

4-POINT BENDING; MECHANICAL EXCITATION SIGNALS; PIEZOELECTRIC COEFFICIENTS; STRAIN DISTRIBUTION;

THIN FILMS;

EID: 37249092053     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-007-9065-y     Document Type: Article

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