Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes

Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012

Volumn , Issue , 2012, Pages

  Chidambaram, Nachiappan ^a   Mazzalai, Andrea ^a   Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

Energy harvester; Interdigitated electrode (IDE); piezo MEMS; PZT thin films

Indexed keywords

ELECTRODE GAP; ENERGY DENSITY; ENERGY HARVESTER; EXPERIMENTAL COMPARISON; FIGURE OF MERITS; INTERDIGITATED ELECTRODES; LEAD ZIRCONATE TITANATE THIN FILMS; PARALLEL-PLATE ELECTRODES; PER UNIT; PIEZOELECTRIC PROPERTY; PZT; PZT THIN FILM; SILICON SUBSTRATES; STRAIN DEFORMATION; TITANIA;

CHEMICAL SENSORS; ENERGY HARVESTING; INTEGRODIFFERENTIAL EQUATIONS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; THIN FILMS; TITANIUM DIOXIDE;

PLATES (STRUCTURAL COMPONENTS);

EID: 84867908736     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2012.6297833     Document Type: Conference Paper

References (6)

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