A gas micropreconcentrator for low level acetone measurements

Microelectronics Reliability

Volumn 52, Issue 11, 2012, Pages 2640-2646

  Rydosz, A ^a   Maziarz, W ^a   Pisarkiewicz, T ^a   Domanski K ^b   Grabiec, P ^b  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION FACTORS; DESORPTION PROCESS; ELEVATED TEMPERATURE; LATERAL DIMENSION; LOW LEVEL; MANUFACTURED STRUCTURES; MICROMACHINING TECHNOLOGIES; MICROPRECONCENTRATOR; PRE-CONCENTRATION; PT HEATERS; SI WAFER; SIGMA-ALDRICH;

ACETONE; DESORPTION; PLATINUM; SILICON WAFERS;

ADSORBENTS;

EID: 84867576496     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2012.05.012     Document Type: Article

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