Single-chip 1×84 MEMS mirror array for optical telecommunication applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4983, Issue , 2003, Pages 53-64

  Juneau, Thor ^a   Chen, Tony ^a,b   Brosnihan, Tim ^a   Rajaraman, Swaminathan ^a   Chau, Kevin ^a   Judy, Mike ^a  

^a ANALOG DEVICES INC   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

MEMS; Mirror; MOEMS; Optics; SOI

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; MICROMACHINING; MIRRORS; OPTICAL COMMUNICATION; PHOTOLITHOGRAPHY; POLYSILICON; ROBUSTNESS (CONTROL SYSTEMS);

MICROMACHINED MIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038397188     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.477936     Document Type: Conference Paper

References (5)

1. O. Degani et al, "Pull-In Study of an Electrostatic Torsion Microactuator," JMEMS, vol. 7, no. 4, Dec. 1998, pp. 373-379.
2. P. B. Chu, S. Lee, and S. Park, "MEMS: The Path to Large Optical Crossconnects," IEEE Communications Magazine, March 2002, pp.80-87.
3. X. Wang, M. Judy, and J. White, "Validating Fast Simulation of Air Damping in Micromachined Devices," MEMS 2002, Las Vegas, Jan. 20-24, pp. 210-213.
4. S. Blackstone and T. J. Brosnihan, "SOI-MEMS Technologies for Optical Switching," Proc. IEEE/LEOS Int. Conf. Optical MEMS '01, Okinawa, Japan, 2001, pp. 35-36.
5. Roessig et al., "Mirrors with Integrated Position Sense Electronics for Optical Switching Applications," 28th European Conference on Optical Communication, Copenhagen, Sep. 8-12, 2002.