Fabrication and characterization of a fully integrated biosensor associating microfluidic device and RF circuit

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2012, Pages

  Pinon, S ^a,b   Diedhiou, D L ^c,d   Boukabache, A ^a,b   Conedera, V ^a,b   Bourrier, D ^a,b   Gue, A M ^a,b   Prigent, G ^b   Rius, E ^c,d   Quendo, C ^c,d   Potelon, B ^c,d   Favennec, J F ^c,d  

^a LAAS CNRS   (France)

^b UNIVERSITÉ PAUL SABATIER   (France)

^c UNIVERSITÉ EUROPÉENNE DE BRETAGNE   (France)

^d UNIVERSITÉ DE BRETAGNE OCCIDENTALE   (France)

Author keywords

Filter; Microfluidic; Microwave; Resonator; Sensor; SU8

Indexed keywords

BIOLOGICAL SENSORS; BURIED CHANNELS; FILTER; FULLY INTEGRATED; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHANNEL; MICROMACHINED; MICROSTRIP TECHNOLOGY; RF-CIRCUITS; STOP-BAND FILTERS; SU8; WATER CONCENTRATIONS;

BIOSENSORS; CUTOFF FREQUENCY; FLUIDIC DEVICES; MICROFLUIDICS; MICROWAVE SENSORS; MICROWAVES; RESONATORS; SENSORS;

MICROWAVE RESONATORS;

EID: 84866787244     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2012.6259480     Document Type: Conference Paper

References (10)

1. S. Gabriel, R. W. Lau, et C. Gabriel, The dielectric properties of biological tissues: III. Parametric models for the dielectric spectrum of tissues, Physics in Medicine and Biology, vol. 41, p. 2271-2293, nov. 1996.
2. K.-K. Liu, R.-G. Wu, Y.-J. Chuang, H. S. Khoo, S.-H. Huang, et F.-G. Tseng, Microfluidic Systems for Biosensing, Sensors, vol. 10, p. 6623-6661, juill. 2010.
3. U. Khan et al., High Frequency Dielectric Characteristics of Tumorous and Non-tumorous Breast Tissues, in Microwave Symposium, 2007. IEEE/MTT-S International, 2007, p. 1341-1344.
4. Sanghyun Seo, T. Stintzing, I. Block, D. Pavlidis, M. Rieke, et P. G. Layer, High frequency wideband permittivity measurements of biological substances using coplanar waveguides and application to cell suspensions, in Microwave Symposium Digest, 2008 IEEE MTT-S International, 2008, p. 915-918.
5. K. Grenier et al., Integrated Broadband Microwave and Microfluidic Sensor Dedicated to Bioengineering, Microwave Theory and Techniques, IEEE Transactions on, vol. 57, no. 12, p. 3246-3253, 2009.
6. P. Abgrall, C. Lattes, V. Conédéra, X. Dollat, S. Colin, et A. M. Gué, A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films, Journal of Micromechanics and Microengineering, vol. 16, p. 113, 2006.
7. C. Dalmay, A. Pothier, P. Blondy, F. Lalloue, et M.-O. Jauberteau, Label free biosensors for human cell characterization using radio and microwave frequencies, in Microwave Symposium Digest, 2008 IEEE MTT-S International, 2008, p. 911-914.
8. K. Grenier et al., Resonant based microwave biosensor for biological cells discrimination, in 2010 IEEE Radio and Wireless Symposium (RWS), 2010, p. 523-526.
9. K. Y. Lee, Micromachining applications of a high resolution ultrathick photoresist, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 13, no. 6, p. 3012, nov. 1995.
10. A. Ghannam, C. Viallon, D. Bourrier, et T. Parra, Dielectric Microwave Characterization of the SU-8 Thick Resin Used in an Above IC Process, in Proceedings of the 39th European Microwave Conference, 2009, p. 1041-1044.