The effect of silicon loss and fabrication tolerance on spectral properties of porous silicon Fabry-Perot cavities in sensing applications

Optics Express

Volumn 20, Issue 20, 2012, Pages 22208-22223

  Hasar, U C ^a   Ozbek, I Y ^a   Oral, E A ^a   Karacali, T ^a   Efeoglu, H ^a  

^a ATATÜRK UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILE MANUFACTURE; CHEMICAL DETECTION; FABRY-PEROT INTERFEROMETERS; POROUS SILICON; REFLECTION; REFRACTIVE INDEX; RESONANCE;

BULK SILICON; CHEMICAL MOLECULES; CHEMICAL VAPOR; F-P CAVITIES; FABRICATION TOLERANCES; FABRY-PEROT CAVITY; KEYPOINTS; LOSSLESS; LOSSY NATURE; NON-UNIFORMITIES; REFLECTIVITY VALUES; RESONANCE WAVELENGTHS; SENSING APPLICATIONS; SPECTRAL PROPERTIES; SURFACE CURRENT DENSITY; TRANSVERSE DIRECTIONS;

WAVELENGTH;

SILICON;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; GENETIC PROCEDURES; INSTRUMENTATION; INTERFEROMETRY; POROSITY; REFRACTOMETRY;

BIOSENSING TECHNIQUES; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; INTERFEROMETRY; POROSITY; REFRACTOMETRY; SILICON;

EID: 84866694751     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.022208     Document Type: Article

References (32)

1. G. Q. Lu and X. S. Zhao, Nanoporous Materials: Science and Engineering (Imperial College Press, 2005).
2. L. Pavesi, "Porous silicon dielectric multilayers and microcavities," Riv. Nuovo Cim. 20(10), 1-76 (1997).
3. K. A. Kilian, T. Bocking, and J. J. Gooding, "The importance of surface chemistry in nanostructured materials: lessons from mesoporous silicon photonic biosensors," Chem. Commun. (Camb.) 630, 630-640 (2009).
4. I. Suarez, V. Chirvony, D. Hill, and J. Martinez-Pastor, "Simulation of surface-modified porous silicon photonic crystals for biosensing applications," Photon. Nanostruct.: Fundam. Appl. 9, 304-311 (2011).
5. V. Agarwal, M. E. Mora-Ramos, and B. Alvarado-Tenorio, "Optical properties of multilayered Period-Doubling and Rudin-Shapiro porous silicon dielectric heterostructures," Photon. Nanostruct.: Fundam. Appl. 7(2), 63-68 (2009).
6. C. Jamois, C. Li, R. Orobtchouk, and T. Benyattou, "Slow Bloch surface wave devices on porous silicon for sensing applications," Photon. Nanostruct.: Fundam. Appl. 8(2), 72-77 (2010).
7. V. Mulloni and L. Pavesi, "Porous silicon microcavities as optical chemical sensors," Appl. Phys. Lett. 76(18), 2523-2525 (2000).
8. H. Ouyang, M. Christophersen, and P. M. Fauchet, "Enhanced control of porous silicon morphology from macropore to mesopore formation," Phys. Status Solidi., A Appl. Mater. Sci. 202(8), 1396-1401 (2005).
9. P. A. Snow, E. K. Squire, P. St. J. Russell, and L. T. Canham, "Vapor sensing using the optical properties of porous silicon Bragg mirrors," J. Appl. Phys. 86(4), 1781-2367 (1999).
10. F. Cunin, T. A. Schmedake, J. R. Link, Y. Y. Li, J. Koh, S. N. Bhatia, and M. J. Sailor, "Biomolecular screening with encoded porous-silicon photonic crystals," Nat. Mater. 1(1), 39-41 (2002).
11. E. Lorenzo, C. J. Oton, N. E. Capuj, M. Ghulinyan, D. Navarro-Urrios, Z. Gaburro, and L. Pavesi, "Porous silicon-based rugate filters," Appl. Opt. 44(26), 5415-5421 (2005).
12. K.-P. S. Dancil, D. P. Greiner, and M. J. Sailor, "A porous silicon optical biosensor: detection of reversible binding of IgG to a protein A-modified surface," J. Am. Chem. Soc. 121(34), 7925-7930 (1999).
13. S. D. Alvarez, A. M. Derfus, M. P. Schwartz, S. N. Bhatia, and M. J. Sailor, "The compatibility of hepatocytes with chemically modified porous silicon with reference to in vitro biosensors," Biomaterials 30(1), 26-34 (2009).
14. T. Karacali, M. Alanyalioglu, and H. Efeoglu, "Single and double Fabry-Perot structure based on porous silicon for chemical sensors," IEEE Sens. J. 9(12), 1667-1672 (2009).
15. H. Ouyang, C. C. Striemer, and P. M. Fauchet, "Quantitative analysis of the sensitivity of porous silicon optical biosensors," Appl. Phys. Lett. 88(16), 163108 (2006).
16. H. Yang and P. Jiang, "Macroporous photonic crystal-based vapor detectors created by doctor blade coating," Appl. Phys. Lett. 98(1), 011104 (2011).
17. J. Liu, Y. Sun, and X. Fan, "Highly versatile fiber-based optical Fabry-Perot gas sensor," Opt. Express 17(4), 2731-2738 (2009).
18. J. Liu, Y. Sun, D. J. Howard, G. Frye-Mason, A. K. Thompson, S.-J. Ja, S.-K. Wang, M. Bai, H. Taub, M. Almasri, and X. Fan, "Fabry-Perot cavity sensors for multipoint on-column micro gas chromatography detection," Anal. Chem. 82(11), 4370-4375 (2010).
19. K. Reddy and X. Fan, "Self-referenced composite Fabry-Perot cavity vapor sensors," Opt. Express 20(2), 966-971 (2012).
20. D. M. Pozar, Microwave Engineering (Wiley, Hoboken, NJ, 2005).
21. P. Schmuki, D. J. Lockwood, Y. H. Ogata, M. Seo, and H. S. Isaacs, eds., Pits and Pores II (Formation, Properties, and Significance for Advanced Materials) (Electrochemical Society, 2004).
22. A. Jane, R. Dronov, A. Hodges, and N. H. Voelcker, "Porous silicon biosensors on the advance," Trends Biotechnol. 27(4), 230-239 (2009).
23. B. Cakmak, T. Karacali, and S. Yu, "Theoretical investigation of chirped mirrors in semiconductor lasers," Appl. Phys. B 81(1), 33-37 (2005).
24. J. B. Pendry and A. MacKinnon, "Calculation of photon dispersion relations," Phys. Rev. Lett. 69(19), 2772-2775 (1992).
25. P. Markos and C. M. Soukoulis, "Transmission studies of left-handed materials," Phys. Rev. B 65(3), 033401 (2001).
26. P. Markos and C. M. Soukoulis, "Numerical studies of left-handed materials and arrays of split ring resonators," Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(3 3 Pt 2B), 036622 (2002).
27. C. A. Balanis, Advanced Engineering Electromagnetics (Wiley, Hoboken, NJ, 1989).
28. D. A. G. Bruggeman, "Berechnung verschiedener physikalischer konstanten von hererogenen substanzen," Ann. Phys. 24, 636-679 (1935).
29. http://www.virginiasemi.com
30. U. C. Hasar and C. R. Westgate, "A broadband and stable method for unique complex permittivity determination of low-loss materials," IEEE Trans. Microw. Theory Tech. 57(2), 471-477 (2009).
31. U. C. Hasar, "A fast and accurate amplitude-only transmission-reflection method for complex permittivity determination of lossy materials," IEEE Trans. Microw. Theory Tech. 56(9), 2129-2135 (2008).
32. A. Papoulis, Probability, Radom Variables and Stochastic Processes (Mcgraw-Hill, NY, 2002).