Single and double fabry - Pérot structure based on porous silicon for chemical sensors

IEEE Sensors Journal

Volumn 9, Issue 12, 2009, Pages 1667-1672

  Karacali, Tevhit ^a   Alanyalioglu, Murat ^a   Efeoglu, Hasan ^a  

^a ATATÜRK UNIVERSITY   (Turkey)

Author keywords

Fabry P rot (FP); Porous silicon (PS); Reflectance

Indexed keywords

DIFFUSION LAYERS; EFFECTIVE REFRACTIVE INDEX; ETCHING TECHNIQUE; FIRST-STOP; INFRARED REGIONS; MULTI-LAYERED STRUCTURE; OPTICAL RESPONSE; RED SHIFT; REFLECTANCE; RESONANT WAVELENGTHS; SOLVENT VAPORS; STOP-BANDS; STRUCTURE-BASED; TIME DEPENDENCE;

CHEMICAL SENSORS; OPTICAL SENSORS; REFLECTION; REFRACTIVE INDEX; SOLVENTS; VAPORS;

POROUS SILICON;

EID: 70350678877     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2030647     Document Type: Article

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