Fatigue characteristics of Si movable comb inserted into MEMS optical devices

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 1, Issue , 2004, Pages 110-112

  Shimazu, Takayuki ^a   Sunaga, Kei ^a   Katayama, Makoto ^a  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FATIGUE CHARACTERISTICS; FRACTURE RATES; MEMSDEVICES; MOVING PARTS; OPERATION CONDITIONS;

EID: 84866123696     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. th International Conference on Micro electro mechanical system, Kyoto, Japan, pp 662-665, 2008-09-08
2. T Ando, M Shikich and R. O.Retchie "Tensle-mode fatigue testing of shioon films as structural matirial for MEMS, Sensor and Actuals A Vol.93, pp, 70-75, 2001
3. C.L.Muhkstein, S.B.Brown R.O.Ritchie, "High-cycle fatigue of single single-crystal silicon thin films "J. Micro electro mechanical System, Vol 10, No.4, pp,893-600, 2001
4. T.Karie, M.Katyama, T Saoo, H.Khoda, T.Sunaga, M.Shiozaki, M.Funlkava, H.Sugaruma, K.Saitch and M,Nishimura "Ultra compact multi channel optical components based on PLC and MEMS technologies " OFC2008 Technical digest Monday-wednesday, pp.388-390
5. th International Conference Micro electro system Miyazaki, Japan pp, 205-210.-,2000.