High-cycle fatigue test of nanoscale Si and SiO2 wires based on AFM technique

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 662-665

  Namazu, Takahiro ^a   Isono, Yoshitada ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BENDING (DEFORMATION); ELASTOPLASTICITY; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; PLASTIC DEFORMATION; SILICA; SILICON; SINGLE CRYSTALS; STRESSES; SURFACE STRUCTURE; THERMAL EFFECTS;

FREQUENCY DEPENDENCE; HIGH-CYCLE FATIGUE TEST; NANOSCALE SINGLE CRYSTAL SILICON; QUASI-STATIC BENDING TEST; STRESS-CONTROLLED CYCLIC BENDING TEST; TEMPERATURE DEPENDENCE;

FATIGUE TESTING;

EID: 0038493953     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. T. Namazu, Y. Isono and T. Tanaka, "Nano-scale bending test of Si beam for MEMS", Proc. in the IEEE 13th International Conference on Micro electro-mechanical Systems. Miyazaki, Japan, pp. 205-210, 2000.
2. Y. Isono, T. Namazu and T. Tanaka, "AFM bending testing of nanometric single crystal silicon wire at intermediate temperatures for MEMS", Proc. in the IEEE 14th International Conference on Micro electro-mechanical Systems, Interlaken, Switzerland, pp. 135-138, 2001.
3. C. L. Muhlstein, S. B. Brown and R. O. Ritchie, "High-cycle fatigue of single-crystal silicon thin films", J. Microelectromechanical Systems, vol. 10, no. 4, pp. 70-75, 2001.
4. T. Ando, M. Shikida and K. Sato, "Tensile-mode fatigue testing of silicon films as structural materials for MEMS", Sensors and Actuators A, vol. 93, pp. 70-75, 2001.
5. 2 wires using AFM technique for NEMS designs", Proc. in the IEEE 2nd international conference on Nanotechnology: Nano-2002, Arlington, U.S.A., pp. 51-54, 2002.