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Volumn 98, Issue , 2012, Pages 607-609
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Microfabrication of magnetically actuated PDMS-Iron composite membranes
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Author keywords
Magnetic actuation; Magnetic nanocomposites; Photolithography; Suspended membranes
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Indexed keywords
DIFFERENT SIZES;
ELASTIC PROPERTIES;
EXCELLENT PERFORMANCE;
EXTERNAL MAGNETIC FIELD;
IRON NANOPOWDER;
MAGNETIC ACTUATION;
MAGNETIC NANOCOMPOSITES;
MEMS TECHNOLOGY;
MICRO FLUIDIC APPLICATIONS;
MICRO PUMP;
PURE POLYMERS;
QUADRATIC DEPENDENCE;
SACRIFICIAL LAYER;
SUSPENDED MEMBRANES;
TACTILE DISPLAY;
TENSILE TESTS;
ULTRA-VIOLET LIGHT;
YOUNG'S MODULUS;
MOBILE DEVICES;
OPTICAL MICROSCOPY;
PHOTOLITHOGRAPHY;
SILICONES;
TENSILE TESTING;
ULTRAVIOLET RADIATION;
POLYMER MATRIX COMPOSITES;
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EID: 84865611310
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2012.05.052 Document Type: Conference Paper |
Times cited : (20)
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References (14)
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