Low resistivity Pt interconnects developed by electron beam assisted deposition using novel gas injector system

Journal of Physics: Conference Series

Volumn 371, Issue , 2012, Pages

  Dias, R J ^a   O'Regan, C ^b   Thrompenaars, P ^c   Romano Rodriguez, A ^a   Holmes, J D ^b   Mulder, J J L ^c   Petkov, N ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITY COLLEGE CORK   (Ireland)

^c Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; ELECTRON BEAMS; ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; HYDROCARBONS; NANOSTRUCTURES; PETROLEUM DEPOSITS; PLATINUM;

CONVENTIONAL HYDROCARBONS; CROSS-SECTIONAL TEM; DEPOSITION OF METALS; ELECTRICAL CHARACTERISTIC; ELECTRICAL CONTACTS; ELECTRICAL TESTS; ELECTRON BEAM-ASSISTED DEPOSITIONS; ELECTRON BEAM-INDUCED DEPOSITION;

ELECTRONS;

EID: 84865404232     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/371/1/012038     Document Type: Conference Paper

References (5)

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4. Botman A, Mulders J J L, Weemaes R, Mentink S, 2006 Nanotechnology 17 3779-3785.
5. Takeguchi M,·Shimojo M,·Furuya K, 2008 Appl Phys A 93 439-442