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Volumn 85, Issue , 2012, Pages 25-28
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Study of oxygen vacancies′ influence on the lattice parameter in ZnO thin film
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Author keywords
Oxygen vacancy; Thin film; XPS; ZnO
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Indexed keywords
ANNEALING PROCESS;
IN-VACUUM;
OXYGEN ATMOSPHERE;
OXYGEN VACANCY CONCENTRATION;
PEAK SHIFT;
RELATIVE INTENSITY;
VALENCE STATE;
XRD;
ZN ATOMS;
ZNO;
ZNO FILMS;
ZNO THIN FILM;
ANNEALING;
LATTICE CONSTANTS;
METALLIC FILMS;
OPTICAL FILMS;
OXYGEN;
THIN FILMS;
VACUUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
ZINC;
ZINC OXIDE;
OXYGEN VACANCIES;
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EID: 84865094128
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2012.06.107 Document Type: Article |
Times cited : (228)
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References (11)
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