Impurity detection in solid and molten silicon by laser induced breakdown spectroscopy

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 74-75, Issue , 2012, Pages 115-118

  Darwiche, Sarah ^a,c   Benrabbah, Rafik ^a,c   Benmansour, Malek ^d   Morvan, Daniel ^a,b  

^a Laboratoire de Génie des Procédés Plasmas et Traitement de Surfaces EA3492   (France)

^b PSL RESEARCH UNIVERSITY   (France)

^c SORBONNE UNIVERSITÉ   (France)

^d Savoie Technolac   (France)

Author keywords

Boron; LIBS; Molten; Silicon

Indexed keywords

APPLICATION OF LASER; CALIBRATION CURVES; CHEMICAL CHARACTERIZATION; EXPERIMENTAL PARAMETERS; LIBS; LIMITS OF DETECTION; MOLTEN SILICON; PROCESS ANALYTICAL; SIGNAL-TO-BACKGROUND RATIO; SOLID SILICON;

BORON; HELIUM; MOLTEN MATERIALS; SILICON;

ARGON;

EID: 84864976810     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2012.06.020     Document Type: Article

References (19)

1. S. Palanco, S. Conesa, and J.J. Laserna Analytical control of liquid steel in an induction melting furnace using a reme laser-induced plasma spectrometer J. Anal. At. Spectrom. 19 2004 462 467
2. C. Aragon, J.A. Aguilera, and J. Campos Determination of carbon content in molten steel using laser-induced breakdown spectroscopy Appl. Spectrosc. 47 1993 606 608
3. R. Noll, H. Bette, A. Brysch, M. Kraushaar, I. Mönch, L. Peter, and V. Sturm Laser-induced breakdown spectrometry- applications for production control and quality assurance in the steel industry Spectrochim. Acta Part B 2001 637 649 (Pubitemid 32683290)
4. F. Boué-Bigne Laser-induced breakdown spectroscopy applications in the steel industry: Rapid analysis of segregation and decarburization Spectrochim. Acta Part B 63 2008 1122 1129
5. D. Romero, and J.J. Laserna Surface and tomographic distribution of carbon impurities in photonic-grade silicon using laser-induced breakdown spectrometry J. Anal. At. Spectrom. 13 1998 557 560 (Pubitemid 128592422)
6. M. Milaan, P. Lucena, L.M. Cabalian, and J.J. Laserna Depth profiling of phosphorus in photonic-grade silicon using laser-induced breakdown spectrometry Appl. Spectrosc. 52 1998 444 448 (Pubitemid 128619554)
7. D. Romero, J.M. Fernandez Romero, and J.J. Laserna Distribution of metal impurities in silicon wafers using imaging-mode multi-elemental laser-induced breakdown spectrometry J. Anal. At. Spectrom. 14 1999 199 204
8. S. Darwiche, M. Benmansour, N. Eliezer, and D. Morvan Investigation of optimized experimental parameters including laser wavelength for boron measurement in photovoltaic grade silicon using laser-induced breakdown spectroscopy Spectrochim. Acta Part B 65 2010 738 743
9. E. Baril, L. St-Onge, M. Sabsabi, and J. Lucas Novel Method for On-line Chemical Analysis of Continuous Galvanizing Baths Galvatech '04, Chicago (IL), April 4-7 2004, published in Galvatech'04 Conf. Proceedings Association for Iron & Steel Technology 2004 1095 1104 (Pubitemid 43342715)
10. M. Sabsabi, R. Héon, J. Lucas, Method and apparatus for in-process liquid analysis by laser induced plasma Spectroscopy, U.S. Pat. No. 6,700,660 issued Sept. 2003.
11. J. Gruber, J. Heitz, H. Strasser, D. Bauerle, and N. Ramaseder Rapid in-situ analysis of liquid steel by laser-induced breakdown spectroscopy Spectrochim. Acta Part B 56 2001 685 693 (Pubitemid 32683293)
12. A.K. Rai, F.Y. Yueh, J.P. Singh, and D.K. Rai Jagdish P. Singh, Surya N. Thakur, Laser-Induced Breakdown Spectroscopy of Solid and Molten Material 255 2007
13. L. St-Onge, E. Kwong, M. Sabsabi, and E.B. Vadas Rapid analysis of liquid formulations containing sodium chloride using laser-induced breakdown spectroscopy J. Pharm. Biomed. Anal. 36 2004 277 284 (Pubitemid 39371072)
14. L. Barette, and S. Turmel On-line iron-ore slurry monitoring for real-time process control of pellet making processes using laser-induced breakdown spectroscopy: graphitic vs. total carbon detection Spectrochim. Acta Part B 56 2001 715 723 (Pubitemid 32683296)
15. N.K. Rai, A.K. Rai, A. Kumar, and S. Thakur Detection sensitivity of laser-induced breakdown spectroscopy for Cr II in liquid samples Appl. Opt. 47 2008 G105 G111
16. A. Kaminska, M. Sawczak, K. Komar, and G. Śliwiński Application of the laser ablation for conservation of historical paper documents Appl. Surf. Sci. 253 2007 7860 7864 (Pubitemid 47058691)
17. X.K. Shen, H. Wang, Z.Q. Xie, Y. Gao, H. Ling, and Y.F. Lu Detection of trace phosphorus in steel using laser-induced breakdown spectroscopy combined with laser-induced fluorescence Appl. Opt. 48 2009 2551 2558
18. A.-M. Matiaske, I.B. Gornushkin, and U. Panne Double-pulse laser-induced breakdown spectroscopy for analysis of molten glass Anal. Bioanal. Chem. 402 2012 2597 2606
19. T. Vaculovic, Z. Zverina, V. Otruba, and V. Kanicky Laser-induced breakdown spectroscopy of molten: influence of sample temperature Z. Naturforsch. 66a 2011 643 648