A novel pneumatically driven SU-8 microvalve for high speed gas chromatographic applications

Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012

Volumn , Issue , 2012, Pages 172-175

  Nubile, A ^a,b   Poggi, A ^a   Cozzani, E ^a   Elmi, I ^a   Zampolli, S ^a   Messina, M ^a   Cardinali, G C ^a   Mancarella, F ^a   Belluce, M ^a  

^a CNR   (Italy)

^b MISTE R   (Italy)

Author keywords

High speed gas chromatography; Integrated fluidic microvalves; Microelectromechanical systems; SU 8

Indexed keywords

CHROMATOGRAPHIC APPLICATION; EXPERIMENTAL CHARACTERIZATION; HIGH-SPEED; HIGH-SPEED GAS CHROMATOGRAPHY; MICRO VALVES; SU-8; TEMPERATURE RANGE; WORKING CONDITIONS;

ELECTROMECHANICAL DEVICES; EXHIBITIONS; FABRICATION; FLUIDICS; GAS CHROMATOGRAPHY; MEMS; NANOTECHNOLOGY;

VALVES (MECHANICAL);

EID: 84864959187     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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