Fiber optic displacement sensor for micro-thickness measurement

Sensor Review

Volumn 32, Issue 3, 2012, Pages 230-235

  Ahmad, H ^a   Yasin, M ^a,b   Thambiratnam, K ^a   Harun, S W ^a  

^a UNIVERSITY OF MALAYA   (Malaysia)

^b AIRLANGGA UNIVERSITY   (Indonesia)

Author keywords

Electrical measurement; Fiber optic displacement sensor; Fiber optics; Fibre optic sensors; Micro thickness measurement; Voltage

Indexed keywords

ELECTRICAL MEASUREMENT; FIBER OPTIC DISPLACEMENT SENSOR; HE-NE LASERS; LOCK-IN AMPLIFIER; MULTIMODES; OUTPUT VOLTAGES; SILICON PHOTODIODE; SUBMICRON; TRANSLATION STAGE;

DIODES; ELECTRIC POTENTIAL; FIBER OPTIC SENSORS; FIBER OPTICS; OPTICAL FIBERS; THICKNESS GAGES; THICKNESS MEASUREMENT;

SENSORS;

EID: 84864883466     PISSN: 02602288     EISSN: None     Source Type: Journal    
DOI: 10.1108/02602281211233223     Document Type: Article

References (13)

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