Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8323, Issue , 2012, Pages

  Okino, Takeshi ^a   Shimada, Takuya ^a   Yuzawa, Akiko ^a   Yamamoto, Ryosuke ^a   Kihara, Naoko ^a   Kamata, Yoshiyuki ^a   Kikitsu, Akira ^a   Akahane, Takashi ^b   Yin, You ^b   Hosaka, Sumio ^b  

^a TOSHIBA CORPORATION   (Japan)

^b GUNMA UNIVERSITY   (Japan)

Author keywords

bit patterned media; Delaunay triangulation; diblock copolymer; DSA; HDD; ordering; self assemble; Voronoi diagram

Indexed keywords

COMPUTATIONAL GEOMETRY; GRAPHIC METHODS; MAGNETIC RECORDING; SELF ASSEMBLY;

BIT-PATTERNED MEDIA; DELAU-NAY TRIANGULATIONS; DSA; HDD; ORDERING; SELF-ASSEMBLE; VORONOI DIAGRAMS;

BLOCK COPOLYMERS;

EID: 84864431536     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.916304     Document Type: Conference Paper

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