Long-range-ordering of self-assembled block copolymer nanodots using EB-drawn guide line and post mixing template

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2571-2575

  Hosaka, Sumio ^a   Akahane, Takashi ^a   Huda, Miftakhul ^a   Tamura, Takuro ^a   Yin, You ^a   Kihara, Naoko ^b   Kamata, Yoshiyuki ^b   Kitsutsu, Akira ^b  

^a GUNMA UNIVERSITY   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

Block copolymer; EB drawing; Guide line; Magnetic recording; Nanodot array; Ordering of self assembled dots; Patterned media; Self assembled

Indexed keywords

EB DRAWING; GUIDE LINE; NANO-DOT ARRAYS; PATTERNED MEDIAS; SELF-ASSEMBLED;

BLOCK COPOLYMERS; COPOLYMERIZATION; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; NANOIMPRINT LITHOGRAPHY; NANOSTRUCTURED MATERIALS; POLYSTYRENES;

MIXING;

EID: 79960050097     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.01.005     Document Type: Conference Paper

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