Nanometer displacement measurement using Fresnel diffraction

Applied Optics

Volumn 51, Issue 21, 2012, Pages 5066-5072

  Khorshad, Ali Akbar ^a   Hassani, Khosrow ^a   Tavassoly, Mohammad Taghi ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

PIEZOELECTRIC CERAMICS;

FRESNEL DIFFRACTION; NANODISPLACEMENTS; NANOSCALE DISPLACEMENT; OPTICAL TECHNIQUE; PHASE STEPS; THERMAL CHANGES; TUNGSTEN WIRES;

DIFFRACTION;

EID: 84864250003     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.005066     Document Type: Article

References (27)

1. J. Fraden, Handbook of Modern Sensors: Physics, Designs and Applications (Springer, 2010).
2. S. Soloman, Sensors Handbook 2nd ed. (McGraw-Hill, 2009).
3. D. S. Nyce, Linear Position Sensors: Theory and Application (Wiley-IEEE, 2004).
4. D. Laing, "A look into the linear displacement and rotary position sensor markets" Sensors 27 (2010), http://www.sensorsmag.com/sensors/ position-presence-proximity/a-look-linear-displacement-and-rotary-position- sensor-market-7699.
5. W. Gao, Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer, 2010).
6. O. V. Angelsky S. G. Hanson, C. Y. Zenkova, M. P. Gorsky and N. V. Gorodyns'ka, "On polarization metrology (estimation) of the degree of coherence of optical waves" Opt. Express 17, 15623-15634 (2009).
7. L. K. Baxter, Capacitive Sensors: Design and Applications (IEEE, 1997).
8. S. A. Solin, "Magnetic field nanosensors" Sci. Am. (July), 71-77 (2004).
9. P. Günther, T. Pfister, and J. Czarske, "Non-incremental interferometric displacement measurement using a laser Doppler sensor with phase coding" Opt. Lasers Eng. 49, 1190-1193 (2011).
10. J. H. Chen, X. G. Huang, J. R. Zhao, J. Tao, W. X. He, and S. H. Liu, "Fabry-Perot interference-based fiber-optic sensor for small displacement measurement" Opt. Commun. 283, 3315-3319 (2010).
11. S. Zhao, C. Hou, J. Bai, G. Yang, and F. Tian, "Nanometer-scale displacement sensor based on phase-sensitive diffraction grating" Appl. Opt. 50, 1413-1416 (2011).
12. N. Lagakos, T. Litovitz, P. Macedo, R. Mohr, and R. Meister, "Multimode optical fiber displacement sensor" Appl. Opt. 20, 167-168 (1981).
13. J. S. Wilson, ed., Sensors Technology Handbook (Elsevier, 2005).
14. L. Perret, L. Chassagne, S. Topu, P. Ruaux, B. Cagneau, and Y Alayli, "Fiber optics sensor for sub-nanometric displacement and wide bandwidth systems" Sensors Actuators A165, 189-193 (2011).
15. I. Iordache, M. Bojan, D. Apostol, V. Damian, F. Garoi, P. C. Logof, R. Muller, and B. Savu, "Optical encoder measurement technology" Proc. SPIE 6635, 663506 (2007).
16. M. T. Tavassoly M. Amiri, A. Darudi, R. Aalipour, A. Saber, and A. R. Moradi, "Optical diffractometry" J. Opt. Soc. Am. A 26, 540-547 (2009).
17. M. Amiri and M. T. Tavassoly, "Fresnel diffraction from 1D and 2D phase steps in reflection and transmission modes" Opt. Commun. 272, 349-361 (2007).
18. M. T. Tavassoly, M. Amiri, E. Karimi, and H. R. Khalesifard, "Spectral modification by line singularity in Fresnel diffraction from 1D phase step" Opt. Commun. 255, 23-34 (2005). (Pubitemid 41394223)
19. A. Sabatyan and M. T. Tavassoly, "Determination of refractive indices of liquids by Fresnel diffraction" Opt. Laser Technol. 41, 892-896 (2009).
20. A. Sabatyan and M. T. Tavassoly, "Application of Fresnel diffraction to nondestructive measurement of the refractive index of optical fibers" Opt. Eng. 46, 1-7 (2006).
21. M. T. Tavassoly, I. M. Haghighi, and K. Hassani, "Application of Fresnel diffraction from a phase step to the measurement of film thickness" Appl. Opt. 48, 5497-5501 (2009).
22. M. Born and E. Wolf, Principles of Optics, 7th ed. (Pergamon, 2007).
23. O. R. George, J. B. DeVelis, G. B. Parrent, and B. J. Thompson, The New Physical Optics Notebook: Tutorials in Fourier Optics (SPIE-American Institute of Physics, 1989).
24. K. D. Mielenz, "Algorithms for Fresnel diffraction at rectangular and circular apertures" J. Res. Natl. Inst. Stand. Technol. 103, 497-509 (1998). (Pubitemid 128498086)
25. E. C. J. von Lommel, "Die Beugungserscheinungen einer kreisrunden Öffnung und eines kreisrunden Schirmchens" Abh. der Math. Phys. Classe der Kön. Bayer. Akad. der Wiss 15, 229-328 (1886).
26. F. W J. Olver, D. W Lozier, and R. F. Boisvert, eds., NIST Handbook of Mathematical Functions (Cambridge University, 2010).
27. "Tutorial: Piezoelectrics in nanopositioning, designing with piezoelectric actuators" http://www.physikinstrumente.com/tutorial.