Application of fresnel diffraction from a phase step to the measurement of film thickness

Applied Optics

Volumn 48, Issue 29, 2009, Pages 5497-5501

  Tavassoly, Mohammad Taghi ^a   Haghighi, Iman Moaddel ^a   Hassani, Khosrow ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; THIN FILMS; VISIBILITY;

ANGLE OF INCIDENCE; FRESNEL DIFFRACTION; INCIDENT ANGLES; LIGHT WAVELENGTHS; MONOCHROMATIC LIGHT; REFLECTED BEAM; REFLECTIVE MATERIALS; RELIABLE RESULTS;

DIFFRACTION;

EID: 70350316601     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.005497     Document Type: Article

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