Transfer bonding of microstructures and fabrication of fragile pdms membranes using water dissolvable film

14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010

Volumn 2, Issue , 2010, Pages 1202-1204

  Karlsson, J M ^a   Haraldsson, T ^a   Carlborg, C F ^a   Stemme, G ^a   Van Der Wijngaart, W ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Microfabrication; Polydimethylsiloxane Microsystems; Polyvinyl Alcohol; Transfer Bonding

Indexed keywords

PDMS MEMBRANE; TRANSFER BONDING;

MICROANALYSIS; MICROFABRICATION; POLYVINYL ALCOHOLS; SILICONES;

CHEMICAL BONDS;

EID: 84863823675     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Onoe et a.l., 3D integration of heterogeneous MEMS structures by stamping transfer, Proc. IEEE MEMS 2007, pp. 175-178, (2007)
2. Meitl et a.l., Transfer printing by kinetic control of adhesion to an elastomeric stamp, Nature materials, 5, pp. 33-38, (2006)
3. de Jong et al., Membranes and microfluidics: a review, Lab Chip, 6, pp. 1125-1139, (2006)
4. Ferrell et al., Fabrication of polymer microstructures for MEMS: sacrificial layer micromolding and patterned substrate micromolding, Biomed Microdevices, 9, pp. 815-821, (2007)