Optimising deposition parameters of W-DLC coatings for tool materials of high speed steel and cemented carbide

Vacuum

Volumn 86, Issue 12, 2012, Pages 2140-2147

  Czyzniewski, Andrzej ^a  

^a KOSZALIN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Acetylene flow rate; Adhesion; Bias voltage; Magnetron sputtering; Taguchi method; W DLC coatings

Indexed keywords

ACETYLENE FLOW; AMORPHOUS CARBON MATRIX; CEMENTED CARBIDES; DEPOSITION PARAMETERS; H/E RATIO; HIGH-ADHESION; HIGH-SPEED STEELS; NANO-COMPOSITE STRUCTURE; NANOCRYSTALLINES; OPTIMUM DEPOSITION; REACTIVE MAGNETRON SPUTTERING; SUBSTRATE BIAS VOLTAGES; TAGUCHI'S METHODS; TOOL MATERIALS;

ADHESION; AMORPHOUS CARBON; BIAS VOLTAGE; CARBIDE TOOLS; CHROMIUM; FLOW RATE; MAGNETRON SPUTTERING; OPTIMIZATION; SUBSTRATES; TAGUCHI METHODS; WEAR RESISTANCE;

COATINGS;

EID: 84863760682     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2012.06.011     Document Type: Article

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