Autocalibrating Stokes polarimeter for materials characterization

Applied Optics

Volumn 51, Issue 18, 2012, Pages 4113-4119

  Shinki, Masaya ^a,b   Ivanov, Mario T ^a   Post, Joshua S ^a   Vagle, Svein ^b   Cullen, Jay T ^a   Hore, Dennis K ^a  

^a UNIVERSITY OF VICTORIA   (Canada)

^b INSTITUTE OF OCEAN SCIENCES   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; REFRACTIVE INDEX;

AUTO-CALIBRATING; AUTOMATED CALIBRATION; CALIBRATION SAMPLES; DESIGN AND CONSTRUCTION; LOCK-IN AMPLIFIER; MATERIALS CHARACTERIZATION; RELATIVE AMPLITUDE; STOKES POLARIMETER;

POLARIMETERS;

EID: 84863757579     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.004113     Document Type: Article

References (33)

1. A. Rothen, "The ellipsometer: An apparatus to measure the thickness of thin surface films," Rev. Sci. Instrum. 16, 26-30 (1945).
2. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).
3. H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry (William Andrew, 2005).
4. J. Humlicek, "Polarized light and ellipsometry," in Handbook of Ellipsometry (Springer, 2005), pp. 3-93.
5. H. G. Tompkins, A User's Guide to Ellipsometry (Dover, 2006).
6. D. E. Aspnes, "Expanding horizons: New developments in ellipsometry and polarimetery," Thin Solid Films 455-456, 3-13 (2004).
7. P. S. Hauge and F. H. Dill, "A rotating-compensator Fourier ellipsometer," Opt. Commun. 14, 431-437 (1975).
8. D. E. Aspnes and P. S. Hauge, "Rotating-compensator/ analyzer fixed-analyzer ellipsometer: Analysis and comparison to other automatic ellipsometers," J. Opt. Soc. Am. 66, 949-954 (1976).
9. D. E. Aspnes, "Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers," J. Opt. Soc. Am. A 21, 403-410 (2004).
10. M. Losurdo, M. Bergmair, G. Bruno, D. Cattelan, C. Cobet, A. Martino, K. Fleischer, Z. Dohcevic-Mitrovic, N. Esser, M. Galliet, R. Gajic, D. Hemzal, K. Hingerl, J. Humlicek, R. Ossikovski, Z. V. Popovic, and O. Saxl, "Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: State-of-the-art, potential, and perspectives," J. Nanopart. Res. 11, 1521-1554 (2009).
11. G. C. Giakos, A. Medithe, S. Sumrain, S. Sukumar, L. Fraiwan, and A. Orozco, "Laser polarimetric imaging of surface defects of semiconductor wafers, microelectronics, and spacecraft structures," IEEE Trans. Instrum. Meas. 55, 2126-2131 (2006).
12. D. K. Goyal and A. Subramanian, "In-situ protein adsorption study on biofunctionalized surfaces using spectroscopic ellipsometry," Thin Solid Films 518, 2186-2193 (2010).
13. S. G. Thakurta, H. J. Viljoen, and A. Subramanian, "Evaluation of the real-time protein adsorption kinetics on albumin-binding surfaces by dynamic in situ spectroscopic ellipsometry," Thin Solid Films 520, 2200-2207 (2012).
14. J. J. I. Ramos, S. Stahl, R. P. Richter, and S. E. Moya, "Water content and buildup of poly(diallyldimethylammonium chloride)/ poly(sodium 4-styrenesulfonate) and poly(allylamine hydrochloride)/ poly(sodium 4-styrenesulfonate) polyelectrolyte multilayers studied by an in situ combination of a quartz crystal microbalance with dissipation monitoring and spectroscopic ellipsometry," Macromolecules 43, 9063-9070 (2010).
15. K. Buchner, N. Ehrhardt, B. P. Cahill, and C. Hoffmann, "Internal reflection ellipsometry for real-time monitoring of polyelectrolyte multilayer growth onto tantalum pentoxide," Thin Solid Films 519, 6480-6485 (2011).
16. M. Kuwahara, R. Endo, K. Tsutsumi, F. Morikasa, T. Tsuroka, T. Fukaya, M. Suzuki, M. Susa, T. Endo, and T. Tadokoro, "Approach for measuring complex refractive index of molten Sb2Te3 by spectroscopic ellipsometry," Appl. Phys. Lett. 100, 101910 (2012).
17. J.-F. Lin, J.-S. Wu, C.-H. Huang, T.-T. Liao, and C.-C. Chang, "The application of a rotating-wave-plate stokes polarimeter for measurement of the optical rotation angle," Optik 122, 14-19 (2011).
18. J.-F. Lin, "Concurrent measurement of linear and circular birefringence using rotating-wave-plate stokes polarimeter," Appl. Opt. 47, 4529-4539 (2008).
19. D. K. Hore, A. Natansohn, and P. Rochon, "Optical anisotropy as a probe of structural order by stokes polarimetry," J. Phys. Chem. B 106, 9004-9012 (2002).
20. D. K. Hore, A. L. Natansohn, and P. L. Rochon, "The characterization of photoinduced chirality in a liquid-crystalline azo polymer on irradiation with circularly polarized light," J. Phys. Chem. B 107, 2506-2518 (2003).
21. W. R. Hunter, "Effects of component imperfections on ellipsometer calibration," J. Opt. Soc. Am. 63, 951-957 (1973).
22. F. L. McCrackin, "Analysis and corrections of instrumental errors in ellipsometry," J. Opt. Soc. Am. 60, 57-63 (1970).
23. S. F. Nee, "Error reductions for a serious compensator imperfection for null ellipsometry," J. Opt. Soc. Am. A 8, 314-321 (1991).
24. P. S. Hauge, "Generalized rotating-compensator ellipsometry," Surf. Sci. 56, 148-160 (1976).
25. R. Kleim, L. Kuntzler, and A. El Ghemmaz, "Systematic errors in rotating-compensator ellipsometry," J. Opt. Soc. Am. 11, 2550-2559 (1994).
26. W. G. Oldeam, "Ellipsometry using a retardation plate as compensator," J. Opt. Soc. Am. 57, 617-622 (1967).
27. C. Flueraru, S. Latoui, J. Besse, and P. Legendre, "Error analysis of a rotating quarter-wave plate Stokes polarimeter," IEEE Trans. Instrum. Meas. 57, 731-735 (2008).
28. Y. W. Liu, G. A. Jones, Y. Peng, and T. H. Shen, "Generalized theory and application of Stokes parameter measurements made with a single photoelastic modulator," J. Appl. Phys. 100, 063537 (2006).
29. E. Hecht and A. Zajac, Optics (Addison-Wesley, 1979).
30. R. Byrd, P. Lu, and J. Nocedal, "A limited memory algorithm for bound constrained optimization," SIAM J. Sci. Stat. Comput. 16, 1190-1208 (1995).
31. C. Zhu, R. Byrd, and J. Nocedal, "L-BFGS-B: Algorithm 778: L-BFGS-B, FORTRAN routines for large scale bound constrained optimization," ACM Trans. Math. Softw. 23, 550-560 (1997).
32. K. C. Jena and D. K. Hore, "A simple transmission-based approach for determining the thickness of transparent films," Am. J. Phys. 79, 256-260 (2011).
33. G. Bucher, Corning 0211, Tech. Rep. (Characterization Science and Services Directorate, Corning Inc., 2003).