Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: State-of-the-art, potential, and perspectives

Journal of Nanoparticle Research

Volumn 11, Issue 7, 2009, Pages 1521-1554

  Losurdo, Maria ^a   Bergmair, Michael ^b   Bruno, Giovanni ^a   Cattelan, Denis ^c   Cobet, Christoph ^d   De Martino, Antonello ^e   Fleischer, Karsten ^d   Dohcevic Mitrovic, Zorana ^f   Esser, Norbert ^d   Galliet, Melanie ^c   Gajic, Rados ^f   Hemzal, Dušan ^g   Hingerl, Kurt ^b   Humlicek, Josef ^g   Ossikovski, Razvigor ^e   Popovic, Zoran V ^f   Saxl, Ottilia ^h  

^a CNR   (Italy)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^c Jobin Yvon   (France)

^d ISAS INSTITUTE FOR ANALYTICAL SCIENCES   (Germany)

^e LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^f UNIVERSITY OF BELGRADE   (Serbia)

^g Institute of Nanotechnology ^*  (Czech Republic)

^h The Institute of Nanotechnology   (United Kingdom)

Author keywords

Nanomaterials; Nanometrology; Nanoparticles; Optical characterization; Polarimetry; Review; Spectroscopic ellipsometry; Thin films

Indexed keywords

FUTURE PERSPECTIVES; GAIN INFORMATION; GEOMETRY FACTORS; MEASUREMENT AND ANALYSIS; METAL NANOPARTICLES; NANO SCALE; NANO-METER SCALE; NANOMATERIALS; NANOMETRICS; NANOMETROLOGY; OPTICAL CHARACTERIZATION; POLARIMETRY; POLARIZED LIGHT REFLECTION; QUANTUM CONFINEMENT EFFECTS; RELATED SYSTEMS; SEMICONDUCTOR NANOCRYSTALS; SUBMICRON;

ANISOTROPY; ELECTRIC WIRE; LIGHT POLARIZATION; LIGHT REFLECTION; NANOCRYSTALS; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; POLARIMETERS; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; SYSTEMS ANALYSIS; THIN FILMS;

NANOPARTICLES;

METAL NANOPARTICLE; NANOCRYSTAL; NANOFILM; NANOMATERIAL; NANOPARTICLE; NANOTUBE; NANOWIRE; QUANTUM DOT;

ANISOTROPY; CONDUCTANCE; ELECTROMAGNETIC FIELD; ELLIPSOMETRY; NANOANALYSIS; POLARIMETRY; PRIORITY JOURNAL; REVIEW; SPECTROSCOPY; SYSTEM ANALYSIS;

EID: 70349756806     PISSN: 13880764     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11051-009-9662-6     Document Type: Review

References (99)

1. DGM Anderson R Barakat 1994 Necessary and sufficient conditions for a Mueller matrix to be derivable from a Jones matrix J Opt Soc Am A 11 2305 2319 10.1364/JOSAA.11.002305 10.1364/JOSAA.11.002305 1994OSAJ...11.2305A 1289993
2. Archer RJ (1964) In: Passaglia E, Stromberg RR, Kruger J (eds) Ellipsometry in the measurement of surfaces and thin films. National Bureau of Standards, Misc. Publ. 256, US Government Printing Office, Washington DC
3. DE Aspnes 1982 Local-field effects and effective-medium theory-a microscopic perspective Am J Phys 50 704 709 10.1119/1.12734 10.1119/1.12734 1982AmJPh..50..704A
4. DE Aspnes 2005 Real-time diagnostics for metalorganic vapor phase Phys Status Solidi B 242 2551 2560 10.1002/pssb.200541109 10.1002/pssb.200541109 2005PSSBR.242.2551A (Pubitemid 41650652)
5. x Te J Vac Sci Technol A 2 600 601 10.1116/1.572455 10.1116/1.572455 1984JVST....2..600A
6. DE Aspnes JP Harbison AA Studna LT Florez 1988 Application of reflectance difference spectroscopy to molecular-beam epitaxy growth of GaAs and AlAs J Vac Sci Technol A 6 1327 1332 10.1116/1.575694 10.1116/1.575694 1988JVST....6.1327A
7. Azzam RMA, Bashara NM (1977) Ellipsometry and polarized light. North-Holland, New York
8. P Babu Dayal BR Mehla PD Paulson 2005 Spin-orbit splitting and critical point energy at Γ and L points of cubic CdTe nanoparticles: effect of size and nonspherical shape Phys Rev B 72 115413 115416 10.1103/PhysRevB.72.115413 10.1103/PhysRevB.72.115413 2005PhRvB..72k5413D (Pubitemid 43029095)
9. G Beydaghyan C Buzea Y Cui C Elliott K Robbie 2005 Ex situ ellipsometric investigation of nanocolumns inclination angle of obliquely evaporated silicon thin films Appl Phys Lett 87 153103 10.1063/1.2084329 10.1063/1.2084329 2005ApPhL..87o3103B
10. Bohren CF, Huffman DR (1983) Absorption and scattering of light by small particles. Wiley, New York
11. L Bolotov T Tsutiya A Nakamura T Ito Y Fujiwara Y Takeda 1999 Semimetal to semiconductor transition in ErP islands grown on InP(001) due to quantum-size effects Phys Rev B 59 12236 12239 10.1103/PhysRevB.59.12236 1999PhRvB..5912236B
12. S Bošković D Djurović Z Dohčević- Mitrović ZV Popović M Zinkevich F Aldinger 2005 Self-propagating room temperature synthesis of nanopowders for solid oxide fuel cells (SOFC) J Power Sources 145 237 242 10.1016/j.jpowsour.2005.01.085 10.1016/j.jpowsour. 2005.01.085
13. JJ Carroll AJ Melmed 1969 Ellipsometry-LEED study od adsorption of oxygen on (011) tungsten Surf Sci 16 251 264 10.1016/0039-6028(69)90022-3 10.1016/0039-6028(69)90022-3 1969SurSc..16..251C
14. YC Chang G Li H Chu J Opsal 2006 Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films J Opt Soc Am A 23 638 645 10.1364/JOSAA.23.000638 10.1364/JOSAA.23.000638 2006OSAJ...23..638C 2232900
15. C Cobet T Schmidtling M Drago N Wollschläger N Esser W Richter RM Feenstra TU Kampen 2003 Surface termination during GaN growth by metalorganic vapor phase epitaxy determined by ellipsometry J Appl Phys 94 6997 6999 10.1063/1.1623630 10.1063/1.1623630 2003JAP....94.6997C
16. RW Collins AS Ferlauto GM Ferreira C Chen J Koh RJ Koval Y Lee JM Pearce CR Wronski 2003 Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry Sol Energy Mater Sol Cells 78 143 180 10.1016/S0927-0248(02)00436-1 10.1016/S0927-0248(02)00436-1
17. PA Cuypers JW Corsem MP Janssen JMM Kop WT Hermens HC Hemker 1983 The adsorption of prothrombin to phosphatidylserine multilayers quantitated by ellipsometry J Biol Chem 258 2426 2431 6822569
18. 2 nanocomposite films J Appl Phys 87 228 235 10.1063/1.371849 10.1063/1.371849 2000JAP....87..228D
19. A De Martino M Foldyna T Novikova D Cattelan P Barritault C Licitra J Hazart J Foucher F Bogeat 2008 Comparison of spectroscopic Mueller polarimetry, standard ellipsometry and real space imaging techniques (SEM and 3D-AFM) for dimensional characterization of periodic structures Proc SPIE 6922 69221P 10.1117/12.772721 10.1117/12.772721
20. G Decher 1997 Fuzzy nanoassemblies: toward layered polymeric multicomposites Science 277 1232 1237 10.1126/science.277.5330.1232 10.1126/science.277.5330.1232 (Pubitemid 27449063)
21. H Deguchi H Yoshida T Inagaki M Horiuchi 2005 EXAFS study of doped ceria using multiple data set fit Solid State Ionics 176 1817 1825 10.1016/j.ssi.2005.04.043 10.1016/j.ssi.2005.04.043 (Pubitemid 41100998)
22. 2-δ nanopowders: potential materials for intermediate temperature solid oxide fuel cells J Phys Condens Matter 18 S2061 S2068 10.1088/0953-8984/18/33/S22 10.1088/0953-8984/18/33/S22 2006JPCM...18S2061D (Pubitemid 44192058)
23. PKL Drude 1900 On the electron theory of metals Ann Phys 1 566 613 10.1002/andp.19003060312 10.1002/andp.19003060312
24. JM Flores-Camacho LD Sun N Saucedo-Zeni G Weidlinger M Hohage P Zeppenfeld 2008 Optical anisotropies of metal clusters supported on a birefringent substrate Phys Rev B 78 075416 075419 10.1103/PhysRevB.78.075416 10.1103/PhysRevB.78.075416 2008PhRvB..78g5416F
25. M Foldyna A De Martino D Cattelan F Bogeat C Licitra J Foucher P Barritault J Hazart 2008 Accurate dimensional characterization of periodic structures by spectroscopic Mueller polarimetry Proc SPIE 7140 714001
26. Foucher J, Pargon E, Martin M, Reyne S, Dupréa C (2008) Paving the way for multiple applications for the 3D-AFM technique in the semiconductor industry. In: Metrology, inspection and process control for microlithography XXI, volume 6922 of proceedings SPIE, pp 69220F1-69220F9
27. B Gallas J Rivory 2003 Spectroscopic ellipsometry study of a self-organized Ge dot layer J Appl Phys 94 2248 2253 10.1063/1.1592882 10.1063/1.1592882 2003JAP....94.2248G
28. E Garcia-Caurel A De Martino B Drévillon 2004 Spectroscopic Mueller polarimeter based on liquid crystal devices Thin Solid Films 455 120 123 10.1016/j.tsf.2003.12.056 10.1016/j.tsf.2003.12.056 2004TSF...455..120G
29. MM Giangregorio M Losurdo A Sacchetti P Capezzuto G Bruno 2006 Plasma processing of the Si(001) surface for tuning SPR of Au/Si-based plasmonic nanostructures J Lumin 121 322 326 10.1016/j.jlumin.2006.08.084 10.1016/j.jlumin.2006.08.084 (Pubitemid 44633095)
30. C Goletti G Bussetti F Arciprete P Chiaradia G Chiarotti 2002 Infrared surface absorption in Si(111)2×1 observed with reflectance anisotropy spectroscopy Phys Rev B 66 153307 10.1103/PhysRevB.66.153307 10.1103/PhysRevB.66.153307 2002PhRvB..66o3307G
31. G Gouadec P Colomban 2007 Raman Spectroscopy of nanomaterials: how spectra relate to disorder, particle size and mechanical properties Prog Cryst Growth Charact Mater 53 1 56 10.1016/j.pcrysgrow.2007.01.001 10.1016/j.pcrysgrow.2007.01.001 (Pubitemid 46437303)
32. 2/Si interface. Mater Sci Rep 1:65-160; and references therein. doi: 10.1016/S0920-2307(86)80001-9
33. AJ Haes S Zou GC Schatz RP van Duyne 2004 A nanoscale optical biosensor: the long range distance dependence of the localized surface plasmon resonance of noble metal nanoparticles J Phys Chem B 108 109 116 10.1021/jp0361327 10.1021/jp0361327
34. AC Hall 1966 On the use of ellipsometry for adsorption measurements below monolayer coverage J Phys Chem 70 1702 1704 10.1021/j100878a003 10.1021/j100878a003
35. MT Harrison SV Kershaw MG Burt A Rogach A Eychmüller H Weller 1999 Investigation and factors affecting the photoluminescence of colloidally-prepared HgTe nanocrystals J Mater Chem 9 2721 2723 10.1039/a907224a 10.1039/a907224a
36. Z Hens D Vanmaekelbergh ES Kooij H Wormeester G Allan C Delerue 2004 Effect of quantum confinement on the dielectric function of PbSe Phys Rev Lett 92 026808 10.1103/PhysRevLett.92.026808 14753958 10.1103/PhysRevLett.92.026808 2004PhRvL..92b6808H
37. JN Hilfiker N Singh T Tiwald D Convey SM Smith JH Baker HG Tompkins 2008 Survey of methods to characterize thin absorbing films with spectroscopic ellipsometry Thin Solid Films 516 7979 7989 10.1016/j.tsf.2008.04.060 10.1016/j.tsf.2008.04.060 2008TSF...516.7979H
38. Himpsel FJ, Altmann KN, Bennewitz R, Crain JN, Kirakosian A, Lin JL, McChesney JL (2001) One-dimensional electronic states at surfaces. J Phys Condens Matter 13:11097-11115; and references therein. doi: 10.1088/0953-8984/ 13/49/301 (Pubitemid 34022306)
39. Horiba Jobin Yvon (2005) How the MM-16 spectroscopic ellipsometer works. Technical note. http://www.horiba.com/scientific/products/ellipsometers/thin- film-metrology/spectroscopic-ellipsometers/?L=0
40. Horiba Jobin Yvon (2008) AutoSE, the simplest thin film measurement tool ever! Technical note. http://www.horiba.com/scientific/products/ellipsometers/ thin-film-metrology/spectroscopic-ellipsometers/?L=0
41. H-T Huang FL Terry Jr 2004 Spectroscopic ellipsometry and reflectometry from gratings (scatterometry) for critical dimension measurement and in situ, real-time process monitoring Thin Solid Films 455-456 828 836 10.1016/j.tsf.2004.04.010 10.1016/j.tsf.2004.04.010
42. J Humlíček 2008 In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures Phys Status Solidi A 205 793 796 10.1002/pssa.200777798 10.1002/pssa.200777798
43. ITRS (2007) http://www.itrs.net/Links/2007ITRS/2007-Chapters/2007- Metrology.pdf
44. GE Jellison FA Modine 1997 Two-modulator generalized ellipsometry: theory Appl Opt 36 8190 8198 10.1364/AO.36.008190 18264356 10.1364/AO.36.008190 1997ApOpt..36.8190J
45. GE Jellison MF Chisholm M Gorbatkin 1993 Optical functions of chemical vapor deposited thin-film silicon determined by spectroscopic ellipsometry Appl Phys Lett 62 3348 3350 10.1063/1.109067 10.1063/1.109067 1993ApPhL..62.3348J
46. T Kanagawa R Hobara I Matsuda T Tanikawa A Natori S Hasegawa 2003 Anisotropy in conductance of a quasi-one-dimensional metallic surface state measured by a square micro-four-point probe method Phys Rev Lett 91 036805 10.1103/PhysRevLett.91.036805 12906438 10.1103/PhysRevLett.91.036805 2003PhRvL..91c6805K
47. TW Kim DC Choo DU Lee HS Lee MS Jang HL Park 2002 Coalescence and electron activation energy in CdTe/ZnTe nanostructures Appl Phys Lett 81 487 489 10.1063/1.1490634 10.1063/1.1490634 2002ApPhL..81..487K (Pubitemid 34935434)
48. ES Kooij H Wormeester EA Martijn Brouwer E van Vroonhoven A van Silfhout B Poelsema 2002 Optical characterization of thin colloidal gold films by spectroscopic ellipsometry Langmuir 18 4401 4413 10.1021/la0256127 10.1021/la0256127 (Pubitemid 35390138)
49. U Kreibig 1978 Transition cluster-solid state in small gold particles Solid State Commun 28 767 769 10.1016/0038-1098(78)91341-8 10.1016/0038-1098(78) 91341-8 1978SSCom..28..767K (Pubitemid 9444004)
50. Kreibig U, Vollmer M (1995) Optical properties of metal clusters. Springer, Berlin
51. A Laskarakis S Logothetidis E Pavlopoulou M Gioti 2004 Mueller matrix spectroscopic ellipsometry: formulation and application Thin Solid Films 455-456 43 49 10.1016/j.tsf.2003.11.197 10.1016/j.tsf.2003.11.197
52. P Lautenschlager M Garriga L Vina M Cardona 1987 Temperature dependence of the dielectric function and interband critical points in silicon Phys Rev B 36 4821 4830 10.1103/PhysRevB.36.4821 10.1103/PhysRevB.36.4821 1987PhRvB..36.4821L
53. 2 electrolyte for the application of intermediate temperature SOFCs Solid State Ionics 176 33 39 10.1016/j.ssi.2004.07.013 10.1016/j.ssi.2004.07.013
54. X López-Lozano A Stekolnikov J Furthmüller F Bechstedt 2005 Band structure and electron gas of In chains on Si(111) Surf Sci 589 77 90 10.1016/j.susc.2005.05.053 10.1016/j.susc.2005.05.053 2005SurSc.589...77L (Pubitemid 41085176)
55. M Losurdo 2004 Relationships among surface processing at the nanometer scale, nanostructure and optical properties of thin oxide films Thin Solid Films 455-456 301 312 10.1016/j.tsf.2003.11.196 10.1016/j.tsf.2003.11.196
56. M Losurdo MM Giangregorio P Capezzuto G Bruno MF Cerqueira M Stepikova 2003 Dielectric function of nanocrystalline silicon with few nanometers (<3 nm) grain size Appl Phys Lett 82 2993 2995 10.1063/1.1569052 10.1063/1.1569052 2003ApPhL..82.2993L
57. M Losurdo G Bruno TH Kim S Choi A Brown A Moto 2005 Nucleation and growth mode of the molecular beam epitaxy of GaN on 4H-SiC exploiting real time spectroscopic ellipsometry J Cryst Growth 284 156 165 10.1016/j.jcrysgro.2005. 07.016 10.1016/j.jcrysgro.2005.07.016 2005JCrGr.284..156L (Pubitemid 41341281)
58. Maier SA (2007) Plasmonics: fundamentals and applications. Springer, New York
59. 2: optical reflectivity measurements Phys Rev B 36 1238 1243 10.1103/PhysRevB.36.1238 10.1103/PhysRevB.36.1238 1987PhRvB..36.1238M
60. JC Maxwell-Garnett 1904 Colours in metal glasses and in metallic films Philos Trans R Soc Lond 203 385 420 10.1098/rsta.1904.0024 10.1098/rsta.1904. 0024 1904RSPTA.203..385M
61. JD McIntyre DE Aspnes 1971 Differential reflection spectroscopy of very thin surface films Surf Sci 24 417 434 10.1016/0039-6028(71)90272-X 10.1016/0039-6028(71)90272-X 1971SurSc..24..417M
62. MG Moharam TK Gaylord 1981 Rigorous coupled analysis of planar-grating diffraction J Opt Soc Am 71 811 818 10.1364/JOSA.71.000811 10.1364/JOSA.71. 000811 1981OSAJ...71..811M
63. MG Moharam EB Grann DA Pommet TK Gaylord 1995 Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings J Opt Soc Am A 12 1068 1076 10.1364/JOSAA.12.001068 10.1364/JOSAA.12.001068 1995OSAJ...12.1068M
64. IS Nerbø M Kildemo S Le Roy I Simonsen E Søndergård L Holt J Walmsley 2008 Characterization of nanostructured GaSb: comparison between large-area optical and local direct microscopic techniques Appl Opt 47 5130 5139 10.1364/AO.47.005130 18830302 10.1364/AO.47.005130 2008ApOpt..47.5130N
65. Nimtz G (1982) In: Hellwege K-H (ed) Landolt-Börnstein, vol 17b. Springer-Verlag, Berlin, p 239
66. T Novikova A De Martino S Ben Hatit B Drévillon 2006 Application of Mueller polarimetry in conical diffraction for CD measurements in microelectronics Appl Opt 45 3688 3697 10.1364/AO.45.003688 16724124 10.1364/AO.45.003688 2006ApOpt..45.3688N (Pubitemid 44072948)
67. T Novikova A De Martino P Bulkin Q Nguyen B Drévillon V Popov A Chumakov 2007 Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction Opt Express 15 2033 2046 10.1364/OE.15.002033 19532441 10.1364/OE.15.002033 2007OExpr..15.2033N (Pubitemid 46376869)
68. TWH Oates 2006 Real time spectroscopic ellipsometry of nanoparticle growth Appl Phys Lett 88 213115 10.1063/1.2206870 10.1063/1.2206870 2006ApPhL..88u3115O (Pubitemid 43814858)
69. MA Ordal LL Long RJ Bell SE Bell RR Bell JRW Alexander CA Ward 1983 Optical properties of the metals Al, Co, Cu, Au, Fe, Pb, Ni, Pd, Pt, Ag, Ti, and W in the infrared and far infrared Appl Opt 22 1099 1119 10.1364/AO.22.001099 10.1364/AO.22.001099 1983ApOpt..22.1099O
70. S Patil S Seal Y Guo A Schulte J Norwood 2006 Role of trivalent La and Nd dopants in lattice distortion and oxygen vacancy generation in cerium oxide nanoparticles Appl Phys Lett 88 243110 243113 10.1063/1.2210795 10.1063/1.2210795 2006ApPhL..88x3110P (Pubitemid 43918143)
71. P Patsalas S Logothetidis L Sygellou S Kennou 2003 Structure-dependent electronic properties of nanocrystalline cerium oxide films Phys Rev B 68 035104 035113 10.1103/PhysRevB.68.035104 10.1103/PhysRevB.68.035104 2003PhRvB..68c5104P
72. Press WH, Flannery BP, Teukolsky SA, Vetterling WT (1992) Numerical recipes in C: second edition, the art of scientific computing. Cambridge University Press, Cambridge
73. 2/Si 100 interface via spectroscopic ellipsometry Appl Phys Lett 91 061925 10.1063/1.2769389 10.1063/1.2769389 2007ApPhL..91f1925P (Pubitemid 47247115)
74. Quintanilha R (2005) Etude du problème inverse en diffractométrie spectroscopique. PhD Thesis, Institut National Polytechnique de Grenoble
75. 2 J Metastable Nanocryst Mater 23 125 130 10.4028/www.scientific.net/JMNM.23.125 10.4028/www.scientific.net/JMNM.23.125
76. A Rogach S Kershaw M Burt M Harrison A Kornowski A Eychmüller H Weller 1999 Colloidally prepared HgTe nanocrystals with strong room-temperature infrared luminescence Adv Mater 11 552 555 10.1002/(SICI)1521-4095(199905)11: 7<552::AID-ADMA552>3.0.CO;2-Q 10.1002/(SICI)1521-4095(199905)11:7<552:: AID-ADMA552>3.0.CO;2-Q
77. J Roither MV Kovalenko S Pichler T Schwarzl W Heiss 2005 Nanocrystal-based microcavity light-emitting devices operating in the telecommunication wavelength range Appl Phys Lett 86 241104 10.1063/1.1947888 10.1063/1.1947888 2005ApPhL..86x1104R (Pubitemid 40908695)
78. Rossow U (1995) In: McGilp JF (ed) Epioptics, chap 3. Springer-Verlag, Berlin, p 46
79. PV Santos P Etchegoin M Cardona B Brar H Kroemer 1994 Optical anisotropy in InAs/AlSb superlattices Phys Rev B 50 8746 8754 10.1103/PhysRevB.50.8746 10.1103/PhysRevB.50.8746 1994PhRvB..50.8746S
80. LB Scaffardi JO Tocho 2006 Size dependence of refractive index of gold nanoparticles Nanotechnology 17 1309 1315 10.1088/0957-4484/17/5/024 10.1088/0957-4484/17/5/024 2006Nanot..17.1309S (Pubitemid 43269419)
81. Sendelbach M, Archie CN (2003) Scatterometry measurement precision and accuracy below 70 nm. In Metrology, inspection, and process control for microlithography XVII. Proceedings SPIE, vol 5038, pp 224-238. doi: 10.1117/12.488117
82. AI Shkrebtii N Esser W Richter WG Schmidt F Bechstedt A Kley BO Fimland R Del Sole 1998 Reflectance anisotropy of GaAs(100). Theory experiment Phys Rev Lett 81 721 724 10.1103/PhysRevLett.81.721 10.1103/PhysRevLett.81.721 1998PhRvL..81..721S
83. SI Shopova G Farca AT Rosenberger WMS Wickramanayake NA Kotov 2004 Microsphere whispering-gallery-mode laser using HgTe quantum dots Appl Phys Lett 85 6101 6103 10.1063/1.1841459 10.1063/1.1841459 2004ApPhL..85.6101S (Pubitemid 40817847)
84. 2-x/2 nanopowders and their electrochemical and EPR characterization Solid State Ionics 175 361 366 10.1016/j.ssi.2004.03.034 10.1016/j.ssi.2004.03.034
85. Teboul E (2008) Innovations in ellipsometry facilitates thin film analysis. Laser Focus World, pp 76-79
86. Tompkins HG (1993) A user's guide to ellipsometry. Academic Press, New York
87. Tompkins HG, Irene EA (2005) In: Handbook of ellipsometry. William Andrew/Springer, New York
88. Toudert J, Babonneau D, Simonot L, Camelio S, Girardeau T (2008) Quantitative modelling of the surface plasmon resonances of metal nanoclusters sandwiched between dielectric layers: the influence of nanocluster size, shape and organization. Nanotechnology 19:125709-125710 and reference therein
89. S Tsunekawa R Sahara Y Kawazoe A Kasuya 2000 Origin of the blue shift in ultraviolet absorption spectra of nanocrystalline CeO(2-x) particles Mater Trans 41 1104 1107
90. Ukraintsev V (2006) A comprehensive test of optical scatterometry readiness for 65 nm technology production. In: Metrology, inspection, and process control for microlithography XX. Proceedings SPIE, vol 6152, p 61521G. doi: 10.1117/12.657649 (Pubitemid 43990270)
91. 2 films J Vac Sci Technol B 18 279 282 10.1116/1.591183 10.1116/1.591183 (Pubitemid 30906695)
92. SR Wasserman GM Whitesides IM Tidswell BM Ocko PS Pershan JD Axe 1989 The structure of self assembled monolayers of alkylsiloxanes on silicon: a comparison of results from ellipsometry and low angle X-ray reflectivity J Am Chem Soc 111 5852 5861 10.1021/ja00197a054 10.1021/ja00197a054
93. JM Wessels HG Nothover WE Ford F von Wrochem F Scholz T Vossmeyer A Schroedter H Weller A Yasuda 2004 Optical and electrical properties of three-dimensional interlinked gold nanoparticle assemblies J Am Chem Soc 126 3349 3356 10.1021/ja0377605 15012165 10.1021/ja0377605 (Pubitemid 38380735)
94. H Wormeester AI Henry ES Kooij B Poelsema MP Pileni 2006 Ellipsometric identification of collective optical properties of silver nanocrystal arrays J Chem Phys 124 204713 204719 10.1063/1.2200647 16774370 10.1063/1.2200647 2006JChPh.124t4713W (Pubitemid 43838644)
95. PC Wu M Losurdo TH Kim S Choi G Bruno AS Brown 2007 In situ spectroscopic ellipsometry to monitor surface plasmon resonant group-III metals deposited by molecular beam epitaxy J Vac Sci Technol B 25 1019 1023 10.1116/1.2734163 10.1116/1.2734163 (Pubitemid 46872411)
96. PC Wu M Losurdo TH Kim M Giangregorio G Bruno HO Everitt AS Brown 2009 Plasmonic gallium nanoparticles on polar semiconductors: interplay between nanoparticle wetting, localized surface plasmon dynamics, and interface charge Langmuir 25 2 924 930 10.1021/la802678y 19105600 10.1021/la802678y
97. HW Yeom S Takeda E Rotenberg I Matsuda K Horikoshi J Schaefer CM Lee SD Kevan T Ohta T Nagao S Hasegawa 1999 Instability and charge density wave of metallic quantum chains on a silicon surface Phys Rev Lett 82 4898 4901 10.1103/PhysRevLett.82.4898 10.1103/PhysRevLett.82.4898 1999PhRvL..82.4898Y
98. Yu PY, Cardona M (1999) Fundamentals of semiconductors, 2nd edn. Springer-Verlag, Berlin
99. X Zhao CM Wei L Yang MY Chou 2004 Quantum confinement and electronic properties of silicon nanowires Phys Rev Lett 92 236805 10.1103/PhysRevLett.92. 236805 15245186 10.1103/PhysRevLett.92.236805 2004PhRvL..92w6805Z