Influence of self-absorption on plasma diagnostics by emission spectral lines

Optics Express

Volumn 20, Issue 12, 2012, Pages 12699-12709

  Gudimenko, Evgueni ^a   Milosavljevic, Vladimir ^a,b   Daniels, Stephen ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN OF EXPERIMENTS; EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS;

CAPACITIVELY COUPLED PLASMAS; EMISSION INTENSITY; EMISSION SPECTRAL; LINE RATIOS; OPTICAL EMISSIONS; PLASMA CONDITIONS; REACTIVE ION ETCH; SEMICONDUCTOR PROCESSING; SPECTRA LINE; SPECTRAL LINE;

LIGHT EMISSION;

EID: 84863740375     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.012699     Document Type: Article

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