Recollections of fifty years with sputtering

Thin Solid Films

Volumn 520, Issue 19, 2012, Pages 6031-6049

  Sigmund, Peter ^a  

^a UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

Sputter emission; Sputter erosion; Sputtering

Indexed keywords

RESEARCH GROUPS; SPUTTER EROSION;

MATERIALS PROPERTIES; SPUTTERING; THIN FILM CIRCUITS; THIN FILMS;

ION BOMBARDMENT;

EID: 84863593902     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.06.003     Document Type: Review

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