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Topics in Applied Physics

Volumn 110, Issue , 2007, Pages 21-31

Computer simulation of the sputtering process

(2) Eckstein, Wolfgang a Urbassek, Herbert M b

a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK (Germany)

b Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 62749100016 PISSN: 03034216 EISSN: 14370859 Source Type: Book Series
DOI: 10.1007/978-3-540-44502-9_2 Document Type: Article

Times cited : (27)

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