Influence of the deposition temperature on the properties of medium-frequency magnetron sputtering WS 2 soft coated tools

Advanced Materials Research

Volumn 472-475, Issue , 2012, Pages 44-49

  Lian, Yunsong ^a   Deng, Jianxin ^a   Li, Shipeng ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Deposition temperature; Medium frequency magnetron sputtering; WS 2 soft coated tools

Indexed keywords

ADHESIVE STRENGTH; ASSISTED DEPOSITION; CEMENTED CARBIDE SUBSTRATES; COATED TOOLS; COATING PROPERTIES; DEPOSITION TEMPERATURES; FINE-GRAINED STRUCTURE; MULTIARC ION PLATING; SOFT COATING;

COATINGS; CRYSTAL ORIENTATION; ION IMPLANTATION; MAGNETRON SPUTTERING;

MANUFACTURE;

EID: 84863269753     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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