High voltage electrostatic driving of MEMS micromirrors

2011 International Symposium on Integrated Circuits, ISIC 2011

Volumn , Issue , 2011, Pages 152-155

  Singh, Ravinder Pal ^a   Langer, Tal ^a   Je, Minkyu ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BOOST CONVERTER; CHARGE PUMP; CMOS PROCESSS; ELECTROSTATIC DRIVING; HIGH VOLTAGE; HIGH VOLTAGE PULSE; HIGH-VOLTAGES; MEMS ACTUATION; MICRO MIRROR; PWM CONTROLLERS; TWO STAGE; VOLTAGE GAIN;

CHARGE PUMP CIRCUITS; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES;

ELECTRIC CHARGE;

EID: 84863076404     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISICir.2011.6131900     Document Type: Conference Paper

References (7)

1. Ravinder Pal Singh and A.M. Khambadkone, "Input voltage switched dc-dc converter with improved transient performance," in IEEE Applied Power Electronics Conference and Exposition, 2008, pp. 824-830.
2. M. H. Kiang, O. Solgaard, K. Y. Lau, and Richard S. Muller, "Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning," Journal of Microlectromechanical Systems, vol. 7, no. 1, pp. 27-37, Mar 1998. (Pubitemid 128604760)
3. Lubianiker Y. and et. al., "Gimbaled scanning micro-mirror apparatus," WIPO,, no. WO 2009147654A1, Dec 2009.
4. C. Ataman and H. Urey, "Nonlinear frequency response of comb-driven microscanners," in Proceedings of SPIE, 2004.
5. M. R. Hoque and T. McNutt et. al., "A high voltage dickson charge pump in SOI CMOS," in Proceedings of IEEE Custom Integrated Circuits Conference (CICC), 2003.
6. Jean-Francois Richard and Yvon Savaria, "High voltage charge pump using standard SOI CMOS technology," in Proceedings of IEEE Northeast Workshop on Circuits adn Systems (NEWCAS), 2004.
7. Duy Dong Pham and Ravinder Pal Singh et. al., "Position sensing and electrostatic actuation circuits for 2-D scanning MEMS micromirror," in Proceedings of Defence, Science and Research (DSR) Conference, 2011.