A high-performance three-dimensional microheater-based catalytic gas sensor

IEEE Electron Device Letters

Volumn 33, Issue 2, 2012, Pages 284-286

  Xu, Lei ^a,b   Li, Tie ^a   Gao, Xiuli ^a   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

3 D microheater; Catalytic gas sensors; concave active membrane; methane; Pd Pt; sol gel

Indexed keywords

ACTIVE MEMBRANES; CATALYTIC MATERIALS; MICROHEATER; OUTPUT SIGNAL; PD-PT; SENSOR RESPONSE; SIGNAL TO NOISE;

CHEMICAL SENSORS; GAS DETECTORS; GASES; GELS; HEATING EQUIPMENT; METHANE; PLATINUM; SIGNAL TO NOISE RATIO; SOL-GEL PROCESS; SOL-GELS; SOLS; THREE DIMENSIONAL;

MICROELECTROMECHANICAL DEVICES;

EID: 84862824843     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2011.2177805     Document Type: Article

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