First autonomous wireless sensor node powered by a vacuum-packaged piezoelectric MEMS energy harvester

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2009, Pages

  Elfrink, R ^a   Pop, V ^a   Hohlfeld, D ^a   Kamel, T M ^a   Matova, S ^a   De Nooijer, C ^a   Jambunathan, M ^a   Goedbloed, M ^a   Caballero, L ^a   Renaud, M ^a   Penders, J ^a   Van Schaijk, R ^a  

^a HOLST CENTRE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE POWER; DUTY CYCLES; ENERGY HARVESTER; EXPERIMENTAL CHARACTERIZATION; PACKAGED DEVICE; PIEZOELECTRIC HARVESTER; PIEZOELECTRIC MEMS; POWER OUT PUT; VACUUM PACKAGE; WAFER-SCALE; WIRELESS SENSOR NODE;

ATMOSPHERIC PRESSURE; ELECTRIC NETWORK SYNTHESIS; ELECTRON DEVICES; ENERGY HARVESTING; PIEZOELECTRICITY; SENSOR NODES; SENSORS; TELECOMMUNICATION EQUIPMENT; VACUUM;

HARVESTERS;

EID: 77952386236     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2009.5424300     Document Type: Conference Paper

References (6)

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4. R. Elfrink, et al. J. Micromech. Microeng. 19 pp. 094005 (2009)
5. M. Renaud, et al., Sensors and Actuators A 145-146, pp. 380-386 (2008)
6. V.Pop, et al., conf. proc. PowerMEMS 2008, pp. 141-144