A two-mask process for fabrication of bottom-gate IGZO-based TFTs

IEEE Electron Device Letters

Volumn 33, Issue 4, 2012, Pages 543-545

  Uhm, Hyun Seok ^a   Lee, Sang Hyuk ^a   Kim, Won ^a   Park, Jin Seok ^a  

^a Hanyang University   (South Korea)

Author keywords

Gray tone mask (GTM); transparent oxide thin film transistor (TFT); two mask process

Indexed keywords

ACTIVE CHANNELS; CURRENT RATIOS; FIELD-EFFECT MOBILITIES; GRAY-TONE MASK (GTM); PIXEL ELECTRODES; SOURCE-DRAIN ELECTRODES; SUBTHRESHOLD SWING; THIN FILM TRANSISTORS (TFT); TWO-MASK PROCESS;

PHOTORESISTS; THIN FILM TRANSISTORS;

FABRICATION;

EID: 84862788738     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2012.2182986     Document Type: Article

References (8)

1. T. Hirao, M. Furuta, T. Hiramatsu, T. Matsuda, C. Li, H. Furuta, H. Hokari, M. Yoshida, H. Ishii, and M. Kakegawa, " Bottom-gate zinc oxide thinfilm transistors (ZnO TFTs) for AM-LCDs, " IEEE Trans. Electron Devices, vol. 55, no. 11, pp. 3136-3142, Nov. 2008.
2. D. Paine, B. Yaglioglu, Z. Beiley, and S. H. Lee, " Amorphous IZObased transparent thin film transistors, " Thin Solid Films, vol. 516, no. 17, pp. 5894-5898, Jul. 2008.
3. H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono, " Amorphous oxide channel TFTs, " Thin Solid Films, vol. 516, no. 7, pp. 1516-1522, Feb. 2008.
4. Y. Ukai, " TFT-LCD manufacturing technology-Current status and future prospect, " in Proc. Int. Workshop Phys. Semicond. Devices, Dec. 2007, pp. 29-34.
5. J. H. Lee, D. H. Kim, D. J. Yang, S. Y. Hong, K. S. Yoon, P. S. Hong, C. O. Jeong, H. S. Park, S. Y. Kim, S. K. Lim, S. S. Kim, K. S. Son, T. S. Kim, J. Y. Kwon, and S. Y. Lee, " World's largest (15-inch) XGA AMLCD panel using IGZO oxide TFT, " SID Symp. Dig., vol. 39, no. 1, pp. 625-628, May 2008.
6. J. K. Jeong, J. H. Jeong, J. H. Choi, J. S. Im, S. H. Kim, H. W. Yang, K. N. Kang, K. S. Kim, T. K. Ahn, H. J. Chung, M. K. Kim, B. S. Gu, J. S. Park, Y. G. Mo, H. D. Kim, and H. K. Chung, " 12. 1-Inch WXGA AMOLED display driven by indium-Gallium-Zinc oxide TFTs array, " SID Symp. Dig., vol. 39, no. 1, pp. 1-4, May 2008.
7. C. W. Kim, Y. B. Park, H. S. Kong, D. G. Kim, S. J. Kang, J. W. Jang, and S. S. Kim, " A novel four-mask-count process architecture for TFT-LCDs, " SID Symp. Dig., vol. 31, no. 1, pp. 1006-1009, May 2000.
8. K. L. Fang, H. T. Lin, and C. H. Chen, " ITO lift-off technique for TFT mask-reduction process, " J. Soc. Inf. Display, vol. 17, no. 6, pp. 519-523, Jun. 2009.