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Volumn 520, Issue 16, 2012, Pages 5211-5214
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Detailed mass spectrometric studies during laser ablation of yttrium target in high vacuum
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Author keywords
Mass spectrometry; Pulsed laser deposition; Yttrium
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Indexed keywords
ABLATION PROCESS;
CHEMICAL SPECIES;
DEPOSITION PROCESS;
HIGH VACUUM;
INTERNAL WALLS;
IONIC SPECIES;
LASER ENERGY DENSITY;
LASER FLUENCES;
MASS SPECTROMETRIC ANALYSIS;
RESIDUAL GAS;
VACUUM SYSTEM;
FIELD EMISSION CATHODES;
LASER ABLATION;
MASS SPECTROMETERS;
MASS SPECTROMETRY;
NITRIDES;
PULSED LASER DEPOSITION;
SURFACE CHEMISTRY;
YTTRIUM;
YTTRIUM ALLOYS;
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EID: 84861729406
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2012.03.110 Document Type: Article |
Times cited : (6)
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References (12)
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