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Volumn 111, Issue 7, 2012, Pages

Effects of lateral straggling of ions on patterned media fabricated by nitrogen ion implantation

Author keywords

[No Author keywords available]

Indexed keywords

DEPTH PROFILE; HIGH-DENSITY; HIGH-DENSITY RECORDING; ION ENERGIES; NITROGEN ION IMPLANTATIONS; PATTERN SIZE; PATTERNED MEDIAS; REDUCTION RATIOS;

EID: 84861724009     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3676427     Document Type: Conference Paper
Times cited : (6)

References (18)
  • 18
    • 84861758388 scopus 로고    scopus 로고
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.