Strain engineering in suspended graphene devices for pressure sensor applications

2012 13th International Conference on Ultimate Integration on Silicon, ULIS 2012

Volumn , Issue , 2012, Pages 21-24

  Smith, A D ^a   Vaziri, S ^a   Delin, A ^a   Ostling M ^a   Lemme, M C ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

device; graphene; membrane; Raman; strain

Indexed keywords

DEVICE; DEVICE LAYOUT; DEVICE STRUCTURES; FABRICATED DEVICE; GRAPHENE DEVICES; PRESSURE DIFFERENCES; RAMAN; SENSOR APPLICATIONS; STRAIN ENGINEERING; STRUCTURE CHANGE; TIGHT-BINDING CALCULATIONS;

MEMBRANES; PRESSURE SENSORS; RAMAN SPECTROSCOPY; STRAIN;

GRAPHENE;

EID: 84861211414     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULIS.2012.6193347     Document Type: Conference Paper

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