Dielectric fluid immersed MEMS tunable capacitors

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2003, Pages 495-498

  McCormick, Daniel T ^a   Li, Zhihong ^a   Tien, Norman ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DAMPING; DIELECTRIC LIQUIDS; ELECTRIC BREAKDOWN; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROWAVE DEVICES; NATURAL FREQUENCIES; PERMITTIVITY; Q FACTOR MEASUREMENT; TUNING;

TUNABLE CAPACITORS;

CAPACITORS;

EID: 0041663538     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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