Patterning by controlled cracking

Nature

Volumn 485, Issue 7397, 2012, Pages 221-224

  Nam, Koo Hyun ^a   Park, Il H ^a   Ko, Seung Hwan ^b  

^a Ewha Womans University   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON NITRIDE;

BIOFILM; CRACKING; GEOMETRY; LOW PRESSURE; SILICON; SUBSTRATE;

CHEMICAL PHENOMENA; CRACKING PHENOMENA; FILM; HYPOBARISM; NANOFABRICATION; PARAMETERS; PATTERNING TECHNIQUE; PRIORITY JOURNAL; REVIEW; VAPOR;

EID: 84860754091     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/nature11002     Document Type: Article

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